Segmenting of processing system into wet and dry areas

ABSTRACT

An electroplating system that includes a wet area comprising one or more electrochemical processing cells for processing one or more semiconductor substrates in an electrolyte solution, a dry area for transferring the semiconductor substrates to the wet area prior to processing the semiconductor substrates and for receiving the semiconductor substrates from the wet area after processing the semiconductor substrates, and a cleaning module for removing unwanted deposits from the semiconductor substrates after processing the semiconductor substrates in the wet area but prior to transferring the semiconductor substrates to the dry area.

CONTINUATION INFORMATION

[0001] This is a continuation of prior filed U.S. patent application Ser. No. 09/658,336, filed Sep. 8, 2000 and entitled “SEGMENTING OF PROCESSING SYSTEM INTO WET AND DRY AREAS,” which is a continuation-in-part of prior filed U.S. patent application Ser. No. 09/289,074, filed Apr. 8, 1999, and entitled “ELECTRO-CHEMICAL DEPOSITION SYSTEM.”

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention generally relates to electroplating of a metal film on a substrate. More particularly, the present invention relates to containing a processing fluid to selected areas within an electroplating system.

[0004] 2. Background of the Related Art

[0005] A variety of processes are performed on semiconductor substrates, such as semiconductor wafers, LCD displays, etc. During such processing, it is desired to keep the substrate as clean as possible. There are a variety of wet processes, such as electroplating, in which the substrate is immersed in a fluid such as electrolyte solution. During electroplating, it becomes especially challenging to keep the substrate clean since the processing involves the immersion of the substrate into electrolyte solution. Electroplating is performed by applying a prescribed voltage across an electrolyte solution between the seed layer on the substrate and an anode. Electroplating deposits metal ions contained within the electrolyte solution on the layer to form the deposited metal film. Electroplating is a wet process in which a fluid electrolyte solution suspends, and transports, metal ions, such as copper sulfate. A metal film is deposited on the seed layer when sufficient negative voltage, known as plating voltage, is applied between the seed layer and the anode. Immersing the substrate into a liquid such as electrolyte solution makes keeping the substrate clean from impurities very difficult.

[0006] The use of electroplating in integrated circuit design originated with the fabrication of lines on circuit boards. Electroplating is now used to deposit metals, such as copper, on substrates to form features, such as vias, trenches, or contacts. One embodiment of feature filling technique that includes electroplating requires initially depositing a diffusion barrier layer on the substrate using physical vapor deposition (PVD) or chemical vapor deposition (CVD). A seed layer is then deposited on the diffusion barrier layer using PVD or CVD to define a plating surface. A metal film is deposited on the seed layer on the substrate by electroplating. Finally, the deposited metal film can be planarized by another process, e.g., chemical mechanical polishing (CMP).

[0007] There are a variety of depositions, chemicals, etc that form on certain locations on substrates, as a result of electroplating, that are desired to remove. For example, undesired deposits formed from the plating material (such as copper) typically form on the backside and/or edge of the substrate surface. Spin-rinse-dry (SRD) and integrated bevel clean (IBC) systems are often used following electroplating to remove the undesired deposits primarily respectively on the backside and on the edge of the substrate. SRD systems and IBC systems both involve the application of wet etchants to the substrate to remove the undesired deposits on the substrate. De-ionized water is applied to the substrate surfaces in the SRD and IBC systems to rinse the etchant from the surface of the substrate.

[0008] Crystals are another undesired substance that forms on substrates. A chemical containing a metal, such as copper sulfate, is contained within the electrolyte solution during processing. As the substrate is removed from the electrolyte solution, some copper sulfate crystals may remain on the substrate. As the electrolyte solution dries on the surface of the substrate, some impurities such as copper sulfate crystals are formed on a surface of the substrate (the front side, the backside, the edge, etc.). As the substrates are handled by robots, the copper sulfate crystals contact the robots, certain portions of subsequent process cells, and other system components. As further substrates are handled by the robots, or processed within the process cells, the latter substrates may also have contact with the crystals.

[0009] Therefore, there remains a need for system that limits the formation of crystal material, deposited material, etc. on selected areas of substrate surfaces during wet processes such as electroplating.

SUMMARY OF THE INVENTION

[0010] Embodiments of the invention are generally directed to a method of processing a semiconductor substrate in a processing system segmented into a wet area and a dry area. The method includes introducing the semiconductor substrate into the dry area of the processing system, moving the semiconductor substrate into the wet area of the processing system, processing the semiconductor substrate in an electrochemical processing cell, and removing unwanted deposits disposed on the semiconductor substrate during processing.

[0011] Embodiments of the invention are also directed to an electroplating system, which includes a wet area comprising one or more electrochemical processing cells for processing one or more semiconductor substrates in an electrolyte solution, a dry area for transferring the semiconductor substrates to the wet area prior to processing the semiconductor substrates and for receiving the semiconductor substrates from the wet area after processing the semiconductor substrates, and a cleaning module for removing unwanted deposits from the semiconductor substrates after processing the semiconductor substrates in the wet area but prior to transferring the semiconductor substrates to the dry area.

[0012] In one embodiment, the cleaning module includes a housing, a rotatable pedestal disposed in the housing, and a first plurality of nozzles disposed around the housing for delivering rinsing fluid to the surfaces of the semiconductor substrates.

[0013] In another embodiment, the dry area includes a thermal chamber configured to anneal the semiconductor substrates after the unwanted deposits are removed from the semiconductor substrates.

[0014] In yet another embodiment, the cleaning module is disposed in a substrate pathway between the one or more electrochemical processing cells and the thermal anneal chamber.

BRIEF DESCRIPTION OF THE DRAWINGS

[0015] So that the manner in which the above recited features, advantages and objects of the present invention are attained can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments thereof which are illustrated in the appended drawings.

[0016]FIG. 1 is a cross sectional view of a typical fountain plater incorporating contacts;

[0017]FIG. 2 is a perspective view of one embodiment of a system platform;

[0018]FIG. 3 is a top schematic view of the system platform of FIG. 2;

[0019]FIG. 4 is a schematic perspective view of one embodiment of a spin-rinse-dry (SRD) module, incorporating rinsing and dissolving fluid inlets;

[0020]FIG. 5 is a side cross sectional view of the spin-rinse-dry (SRD) module of FIG. 4 and shows a substrate in a processing position vertically disposed between fluid inlets;

[0021]FIG. 6 is a cross sectional view of one embodiment of electroplating process cell;

[0022]FIG. 7 is a partial cross sectional perspective view of one embodiment of a cathode contact ring;

[0023]FIG. 8 is a cross sectional perspective view of the cathode contact ring showing an alternative embodiment of contact pads;

[0024]FIG. 9 is a cross sectional perspective view of the cathode contact ring showing an alternative embodiment of the contact pads and an isolation gasket;

[0025]FIG. 10 is a cross sectional perspective view of the cathode contact ring showing the isolation gasket;

[0026]FIG. 11 is a simplified schematic diagram of one embodiment of the electrical circuit representing the electroplating system through each contact;

[0027]FIG. 12 is a cross sectional view of one embodiment of one embodiment of a substrate assembly;

[0028]FIG. 12A is an enlarged cross sectional view of one embodiment of the bladder area of FIG. 12;

[0029]FIG. 13 is a partial cross sectional view of one embodiment of a substrate holder plate;

[0030]FIG. 14 is a partial cross sectional view of one embodiment of a manifold;

[0031]FIG. 15 is a partial cross sectional view of one embodiment of a bladder;

[0032]FIG. 16 is a schematic diagram of one embodiment of an electrolyte replenishing system;

[0033]FIG. 17 is a cross sectional view of one embodiment of a rapid thermal anneal chamber;

[0034]FIG. 18 is a perspective view of an alternative embodiment of a cathode contact ring;

[0035]FIG. 19 is a partial cross sectional view of an alternative embodiment of a substrate holder assembly;

[0036]FIG. 20 is a cross sectional view of one embodiment of an encapsulated anode;

[0037]FIG. 21 is a cross sectional view of another embodiment of an encapsulated anode;

[0038]FIG. 22 is a cross sectional view of another embodiment of an encapsulated anode;

[0039]FIG. 23 is a cross sectional view of yet another embodiment of an encapsulated anode;

[0040]FIG. 24 is a top schematic view of one embodiment of a mainframe transfer robot having a flipper robot incorporated therein;

[0041]FIG. 25 is an alternative embodiment of the process head assembly having a rotatable head assembly;

[0042]FIGS. 26a and 26 b are cross sectional views of embodiments of a degasser module; and

[0043]FIG. 27 is one embodiment of one embodiment of a method performed by a controller during operation of the system platform.

[0044] The terms “below”, “above”, “bottom”, “top”, “up”, “down”, “upper”, and “lower” and other positional terms used herein are shown with respect to the embodiments in the figures and may be varied depending on the specific relative orientation of the processing apparatus.

[0045] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0046] This disclosure describes several embodiments of system platforms that perform a series of processes. Some of the processes are considered “wet” processes. Wet processes are those processes, such as electroplating, that involve a liquid such as an electrolyte solution. Electrolyte solution often contains a chemical including the metal used for electroplating, such as copper sulfate for copper electroplating. When the electrolyte solution dries leaving a residue on the surface of a substrate, the chemical (copper sulfate) takes the form of crystals that adhere to the surface of the substrate and other surfaces on which the electrolyte solution dries. If the substrate carries copper sulfate crystals on its surface, other process cells, robots, etc. that come in contact with the substrate can become coated with crystals. The structure and operation of multiple embodiments of electroplating systems are described. The segmenting of such system platforms including electroplating systems (and other wet systems) into wet and dry areas is then described. The wet areas are those areas that the processing is performed. The dry areas are those areas that the substrate is introduced into, or removed from, the system platform.

[0047] Electroplating System and Operation

[0048] In this disclosure, the term “substrate” is intended to describe substrates, wafers, or other objects that can be processed within a system platform or fountain plater. The substrates are generally cylindrical or rectangular, may be of any size (though they commonly have a 200 mm or 300 mm diameter) and may include such irregularities as notches or flatted surfaces that assist in processing.

[0049]FIG. 1 shows one embodiment of fountain plater 10 used in electroplating. The fountain plater 10 includes an electrolyte cell 12, a substrate holder 14, an anode 16, and a contact ring 20. The electrolyte cell 12 contains electrolyte solution, and the electrolyte cell has a top opening 21 circumferentially defined by the contact ring 20. The substrate holder 14 is disposed above the electrolyte cell, and is capable of displacing the substrate to be immersed into, and removed out of, the electrolyte solution. The substrate holder containing a substrate enters, and is removed from, the electrolyte cell through the top opening of the electrolyte cell. The contact ring 20 comprises a plurality of metal or metal alloy electrical contacts that electrically contact the seed layer on the substrate. A controller 222 controls the electricity supplied to the anode. The controller 222 also controls the electricity supplied to the seed layer on the substrate when the seed layer is being plated. The controller thereby determines the electrical current/voltage established across from the anode to the seed layer on the substrate.

[0050]FIG. 2 is a perspective view of one embodiment of the system platform 200 used in electroplating. FIG. 3 is a top schematic view of the system platform 200 of FIG. 2. Referring to both FIGS. 2 and 3, the system platform 200 generally comprises a loading station 210, a rapid thermal anneal (RTA) chamber 211, a spin-rinse-dry (SRD) station 212, a mainframe 214, the controller 222, and an electrolyte solution replenishing system 220. Preferably, the system platform 200 is enclosed in a clean environment using panels made from such materials as PLEXIGLAS® (a registered trademark of the Rohm and Haas Company of West Philadelphia, Pa.). The mainframe 214 generally comprises a mainframe transfer station 216 and a plurality of processing stations 218. Each processing station 218 includes one or more process cells 240. An electrolyte solution replenishing system 220 is positioned adjacent the system platform 200 and connected to the process cells 240 individually to circulate electrolyte solution used for the electroplating process.

[0051] The controller 222 comprises a central processing unit (CPU) 260, memory 262, circuit portion 265, input output interface (I/O) 279, and bus (not shown). The controller 222 may be a general-purpose computer, a microprocessor, a microcontroller, or any other known suitable type of computer or controller. The CPU 260 performs the processing and arithmetic operations for the controller 222. The controller 222 controls the processing, robotic operations, timing, etc. associated with the system platform 200. The controller 222 controls the voltage applied to the anode 16, the plating surface 15 of the substrate 22, and the operation of the substrate holder assembly, one embodiment of which is shown as 450 in FIG. 6.

[0052] The memory 262 includes a random access memory (RAM) and a read only memory (ROM) that together store the computer programs, operands, operators, dimensional values, system processing temperatures and configurations, and other parameters that control the electroplating operation. The bus provides for digital information transmissions between CPU 260, circuit portion 265, memory 262, and I/O 279. The bus also connects I/O 279 to the portions of the ECP system 200 that either receive digital information from, or transmit digital information to, the controller 222.

[0053] I/O 279 provides an interface to control the transmissions of digital information between each of the components in controller 222. I/O 279 also provides an interface between the components of the controller 222 and different portions of the ECP system 200. Circuit portion 265 comprises all of the other user interface devices (such as display and keyboard).

[0054] The loading station 210 preferably includes one or more substrate cassette receiving areas 224, one or more loading station transfer robots 228 and at least one substrate orientor 230. The number of substrate cassette receiving areas, loading station transfer robots 228 and substrate orientors included in the loading station 210 can be configured according to the desired throughput of the system. As shown for one embodiment in FIGS. 2 and 3, the loading station 210 includes two substrate cassette receiving areas 224, two loading station transfer robots 228 and one substrate orientor 230. A substrate cassette 232 containing substrates 234 is loaded onto the substrate cassette receiving area 224 to introduce substrates 234 into the system platform. The loading station transfer robot 228 transfers substrates 234 between the substrate cassette 232 and the substrate orientor 230. The loading station transfer robot 228 comprises a typical transfer robot commonly known in the art. The substrate orientor 230 positions each substrate 234 in a desired orientation to ensure that the substrate is properly processed. The loading station transfer robot 228 also transfers substrates 234 between the loading station 210 and the SRD station 212 and between the loading station 210 and the thermal anneal chamber 211.

[0055]FIG. 4 is a schematic perspective view of one embodiment of a spin-rinse-dry (SRD) module, incorporating rinsing and dissolving fluid inlets. FIG. 5 is a side cross sectional view of the spin-rinse-dry (SRD) module of FIG. 4 and shows a substrate in a processing position vertically disposed between fluid inlets. Preferably, the SRD station 212 includes one or more SRD modules 236 and one or more substrate pass-through cassettes 238. Additionally, an integrated bevel clean (IBC) system 235, that is also known as an edge bead removal module, can be applied to the system platform 200 within the SRD station in close proximity to, (and typically above) the SRD module 236. The IBC system 235 is configured to remove unwanted deposits particularly from the edge or bevel of a substrate. The IBC system 235 applies etchants to the surface of the unwanted deposits, then applies de-ionized water to remove the residue from the etched deposits. Preferably, the SRD station 212 includes two SRD modules 236 corresponding to the number of loading station transfer robots 228, and a substrate pass-through cassette (the in-station) 238 is positioned above each SRD module 236. The in-station 238 is typically positioned below the level of the IBC system 235. The substrate pass-through cassette 238 (also known as an in-station) facilitates substrate transfer between the loading station 210 and the mainframe 214. The substrate pass-through cassette 238 provides access to and from both the loading station transfer robot 228 and a robot in the mainframe transfer station 216.

[0056] Referring to FIGS. 4 and 5, the SRD module 236 comprises a bottom 330 a and a sidewall 330 b, and an upper shield 330 c which collectively define a SRD module bowl 330 d, where the shield attaches to the sidewall and assists in retaining the fluids within the SRD module. Alternatively, a removable cover that covers the SRD module bowl could also be used. A pedestal 336, located in the SRD module, includes a pedestal support 332 and a pedestal actuator 334. The pedestal 336 supports the substrate 338 (shown in FIG. 5) on the pedestal upper surface during processing. The pedestal actuator 334 rotates the pedestal to spin the substrate and raises and lowers the pedestal as described below. The substrate may be held in place on the pedestal by a plurality of clamps 337. The clamps pivot with centrifugal force and engage the substrate preferably in the edge exclusion zone of the substrate. In a preferred embodiment, the clamps engage the substrate only when the substrate lifts off the pedestal during the processing. Vacuum passages (not shown) may also be used as well as other holding elements. The pedestal has a plurality of pedestal arms 336 a and 336 b, so that the fluid through the second nozzle may impact as much surface area on the lower surface on the substrate as is practical. An outlet 339 allows fluid to be removed from the SRD module.

[0057] A first conduit 346, through which a first fluid 347 flows, is connected to a valve 347 a. The conduit may be hose, pipe, tube, or other fluid containing conduits. The valve 347 a controls the flow of the first fluid 347 and may be selected from a variety of valves including a needle, globe, butterfly, or other valve types and may include a valve actuator, such as a solenoid, that can be controlled with a controller 222. The conduit 346 connects to a first fluid inlet 340 that is located above the substrate and includes a mounting portion 342 to attach to the SRD module and a connecting portion 344 to attach to the conduit 346. The first fluid inlet is shown with a single first nozzle 348 to deliver a first fluid 347 under pressure onto the substrate upper surface. However, multiple nozzles could be used and multiple fluid inlets could be positioned about the inner perimeter of the SRD module. Preferably, nozzles placed above the substrate should be outside the diameter of the substrate to lessen the risk of the nozzles dripping on the substrate. The first fluid inlet could be mounted in a variety of locations, including through a cover positioned above the substrate. Additionally, the nozzle may articulate to a variety of positions using an articulating member 343, such as a ball and socket joint.

[0058] Similar to the first conduit and related elements described above, a second conduit 352 is connected to a control valve 349 a and a second fluid inlet 350 with a second nozzle 351. The second fluid inlet 350 is shown below the substrate and angled upward to direct a second fluid under the substrate through the second nozzle 351. Similar to the first fluid inlet, the second fluid inlet may include a plurality of nozzles, a plurality of fluid inlets and mounting locations, and a plurality of orientations including using the articulating member 353. Each fluid inlet could be extended into the SRD module at a variety of positions. For instance, if the flow is desired to be a certain angle that is directed back toward the SRD module periphery along the edge of the substrate. The nozzles can be extended radially outward and the discharge from the nozzles be directed back toward the SRD module periphery.

[0059] The controller 222 could individually control the two fluids and their respective flow rates, pressure, and timing, and any associated valving, as well as the spin cycle(s). The controller could be remotely located, for instance, in a control panel or control room and the plumbing controlled with remote actuators. An alternative embodiment, shown in dashed lines, provides an auxiliary fluid inlet 346 a connected to the first conduit 346 with a conduit 346 b and having a control valve 346 c. The alternate embodiment may be used to flow a rinsing fluid on the backside of the substrate after the dissolving fluid is applied. The rinsing fluid may be applied without having to reorient the substrate or switch the flow through the second fluid inlet to a rinsing fluid.

[0060] In one embodiment, the substrate is mounted with the deposition surface of the disposed face up in the SRD module bowl. As will be explained below, for such an arrangement, the first fluid inlet would generally flow a rinsing fluid. The rinsing fluid is typically de-ionized water or alcohol. Consequently, the backside of the substrate would be mounted facing down and a fluid flowing through the second fluid inlet would be a dissolving fluid, such as an acid, (the acid may be hydrochloric acid, sulfuric acid, phosphoric acid, hydrofluoric acid, or other dissolving liquids or fluids), depending on the deposits and material to be dissolved. Alternatively, the first fluid and the second fluid are both rinsing fluids, such as de-ionized water or alcohol, when the desired process is only to rinse (and not etch) the processed substrate.

[0061] In operation, the pedestal is in a raised position, shown in FIG. 4, and a robot (not shown) places the substrate, front side up, onto the pedestal. The pedestal lowers the substrate to a processing position where the substrate is vertically disposed between the first and the second fluid inlets. Generally, the pedestal actuator rotates the pedestal between about 5 to about 5000 rpm, with a typical range between about 20 to about 2000 rpm for a 200 mm substrate. The rotation causes the lower end 337 a of the clamps to rotate outward about pivot 337 b, toward the periphery of the SRD module sidewall, due to centrifugal force. The clamp rotation forces the upper end 337 c of the clamp inward and downward to center and hold the substrate 338 in position on the pedestal 336, preferably along the substrate edge. The clamps may rotate into position without touching the substrate and hold the substrate in position on the pedestal only if the substrate significantly lifts off the pedestal during processing.

[0062] With the pedestal rotating the substrate, a rinsing fluid is delivered onto the substrate front side through the first fluid inlet 340. The second fluid, such as an acid, is delivered to the backside surface through the second fluid inlet to remove any unwanted deposits. The dissolving fluid chemically reacts (to etch) with the deposited material, dissolves, and then flushes the material away from the substrate backside (and flushes the material away from other areas that any unwanted deposits are located). In a preferred embodiment, the rinsing fluid is adjusted to flow at a greater rate than the dissolving fluid to help protect the front side of the substrate from the dissolving fluid. The first and second fluid inlets are located for optimal performance depending on the size of the substrate, the respective flow rates, spray patterns, and amount and type of deposits to be removed, among other factors. In some instances, the rinsing fluid could be routed to the second fluid inlet after a dissolving fluid has dissolved the unwanted deposits to rinse the backside of the substrate. In other instances, an auxiliary fluid inlet connected to flow rinsing fluid on the backside of the substrate could be used to rinse any dissolving fluid residue from the backside. After rinsing the front side and/or backside of the substrate, the fluid(s) flow is stopped and the pedestal continues to rotate, spinning the substrate, and thereby effectively drying the surface.

[0063] The fluid(s) is generally delivered in a spray pattern, which may be varied depending on the particular nozzle spray pattern desired and may include a fan, jet, conical, and other patterns. One spray pattern for the first and second fluids through the respective fluid inlets, when the first fluid is a rinsing fluid, is fan pattern with a pressure of about 10 to about 15 pounds per square inch (psi) and a flow rate of about 1 to about 3 gallons per minute (gpm) (for a 200 mm substrate).

[0064] The SRD module could also be used to remove the unwanted deposits along the edge of the substrate to create an edge exclusion zone. The unwanted deposits could be removed from the edge and/or edge exclusion zone of the substrate by adjustment of the orientation and placement of the nozzles, the flow rates of the fluids, the rotational speed of the substrate, and the chemical composition of the fluids. Thus, substantially preventing dissolution of the deposited material on the front side surface may not necessarily include the edge or edge exclusion zone of the substrate. Also, preventing dissolution of the deposited material on the front side surface is intended to include at least preventing the dissolution so that the front side with the deposited material is not impaired beyond a commercial value.

[0065] One method of accomplishing the edge exclusion zone dissolution process is to rotate the disk at a slower speed, such as about 100 to about 1000 rpm, while dispensing the dissolving fluid on the backside of the substrate. The centrifugal force moves the dissolving fluid to the edge of the substrate and forms a layer of fluid around the edge due to surface tension of the fluid, so that the dissolving fluid overlaps from the backside to the front side in the edge area of the substrate. The rotational speed of the substrate and the flow rate of the dissolving fluid may be used to determine the extent of the overlap onto the front side. For instance, a decrease in rotational speed or an increase in flow results in a less overlap of fluid to the opposing side, e.g., the front side. Additionally, the flow rate and flow angle of the rinsing fluid delivered to the front side can be adjusted to offset the layer of dissolving fluid onto the edge and/or front side of the substrate. In some instances, the dissolving fluid may be used initially without the rinsing fluid to obtain the edge and/or edge exclusion zone removal, followed by the rinsing/dissolving process of the SRD module.

[0066] The SRD module 236 is connected between the loading station 210 and the mainframe 214. The mainframe 214 generally comprises a mainframe transfer station 216 and a plurality of processing stations 218. Referring to FIGS. 2 and 3, the mainframe 214, as shown, includes two processing stations 218, each processing station 218 having two process cells 240. The mainframe transfer station 216 includes a mainframe transfer robot 242. Preferably, the mainframe transfer robot 242 comprises a plurality of individual robot arms 244 that provides independent access of substrates in the processing stations 218 and the SRD stations 212. As shown in FIG. 3, the mainframe transfer robot 242 comprises two robot arms 244, corresponding to the number of process cells 240 per processing station 218. Each robot arm 244 includes a robot blade 246 for holding a substrate during a substrate transfer. Preferably, each robot arm 244 is operable independently of the other arm to facilitate independent transfers of substrates in the system. Alternatively, the robot arms 244 operate in a linked fashion such that one robot extends as the other robot arm retracts.

[0067] Preferably, the mainframe transfer station 216 includes a flipper robot 248 that facilitates transfer of a substrate from a face-up position on the robot blade 246 of the mainframe transfer robot 242 to a face down position for a process cell 240 that requires face-down processing of substrates. The flipper robot 248 includes a main body 250 that provides both vertical and rotational movements with respect to a vertical axis of the main body 250 and a flipper robot arm 252 that provides rotational movement along a horizontal axis along the flipper robot arm 252. Preferably, a vacuum suction gripper 254, disposed at the distal end of the flipper robot arm 252, holds the substrate as the substrate is flipped and transferred by the flipper robot 248. The flipper robot 248 positions a substrate 234 into the process cell 240 for face-down processing. The details of the electroplating process cell will be discussed below.

[0068]FIG. 24 is a top schematic view of a mainframe transfer robot having a flipper robot incorporated therein. The mainframe transfer robot 242 as shown in FIG. 24 serves to transfer substrates between different stations attached the mainframe station, including the processing stations and the SRD stations. The mainframe transfer robot 242 includes a plurality of robot arms 2402 (two shown), and a flipper robot 2404 is attached as an end effector for each of the robot arms 2402. Flipper robots are generally known in the art and can be attached as end effectors for substrate handling robots, such as model RR701, available from Rorze Automation, Inc., located in Milpitas, Calif. The main transfer robot 242 comprising a flipper robot as the end effector is capable of transferring substrates between different stations attached to the mainframe as well as flipping the substrate being transferred to the desired surface orientation, i.e., substrate processing surface being face-down for the electroplating process. Preferably, the mainframe transfer robot 242 provides independent robot motion along the X-Y-Z axes by the robot arm 2402 and independent substrate flipping rotation by the flipper robot end effector 2404. By incorporating the flipper robot 2404 as the end effector of the mainframe transfer robot, the substrate transfer process is simplified because the step of passing a substrate from a mainframe transfer robot to a flipper robot is eliminated.

[0069]FIG. 6 is a cross sectional view of one embodiment of an electroplating process cell 400. The electroplating process cell 400 as shown in FIG. 6 may be the same electroplating process cell 240 shown in FIGS. 2 and 3. The process cell 400 generally comprises a head assembly 410, a process cell 420 and an electrolyte solution collector 440. Preferably, the electrolyte solution collector 440 is secured onto the body 442 of the mainframe 214 over an opening 443 that defines the location for placement of the process cell 420. The electrolyte solution collector 440 includes an inner wall 446, an outer wall 448 and a bottom 447 connecting the walls. An electrolyte solution outlet 449 is disposed through the bottom 447 of the electrolyte solution collector 440 and connected to the electrolyte solution replenishing system 220 (shown in FIG. 2) through tubes, hoses, pipes or other fluid transfer connectors.

[0070] The head assembly 410 is mounted onto a head assembly frame 452. The head assembly frame 452 includes a mounting post 454 and a cantilever arm 456. The mounting post 454 is mounted onto the body 442 of the mainframe 214, and the cantilever arm 456 extends laterally from an upper portion of the mounting post 454. Preferably, the mounting post 454 provides rotational movement with respect to a vertical axis along the mounting post to allow rotation of the head assembly 410. The head assembly 410 is attached to a mounting plate 460 disposed at the distal end of the cantilever arm 456. The lower end of the cantilever arm 456 is connected to a cantilever arm actuator 457, such as a pneumatic cylinder, mounted on the mounting post 454. The cantilever arm actuator 457 provides pivotal movement of the cantilever arm 456 with respect to the joint between the cantilever arm 456 and the mounting post 454. When the cantilever arm actuator 457 is retracted, the cantilever arm 456 moves the head assembly 410 away from the process cell 420 to provide the spacing required to remove and/or replace the process cell 420 from the electroplating process cell 400. When the cantilever arm actuator 457 is extended, the cantilever arm 456 moves the head assembly 410 toward the process cell 420 to position the substrate in the head assembly 410 in a processing position.

[0071] The head assembly 410 generally comprises a substrate holder assembly 450 and a substrate assembly actuator 458. The substrate assembly actuator 458 is mounted onto the mounting plate 460, and includes a head assembly shaft 462 extending downwardly through the mounting plate 460. The lower end of the head assembly shaft 462 is connected to the substrate holder assembly 450 to position the substrate holder assembly 450 in a processing position and in a substrate loading position.

[0072] The substrate holder assembly 450 generally comprises a substrate holder 464 and an electric contact element 466. FIG. 7 is a cross sectional view of one embodiment of an electric contact element 466. In general, the electric contact element 466 comprises an annular body having a plurality of conducting members disposed thereon. The annular body is constructed of an insulating material to electrically isolate the plurality of conducting members. Together the body and conducting members form a diametrically interior substrate seating surface which, during processing, supports a substrate and provides a current thereto.

[0073] Referring now to FIG. 7 in detail, the electric contact element 466 generally comprises a plurality of conducting members 765 at least partially disposed within an annular insulative body 770. The insulative body 770 is shown having a flange 762 and a downward sloping shoulder portion 764 leading to a substrate seating surface 768 located below the flange 762. The flange 762 and the substrate seating surface 768 lie in offset and substantially parallel planes. Thus, the flange 762 may be understood to define a first plane while the substrate seating surface 768 defines a second plane parallel to the first plane wherein the shoulder 764 is disposed between the two planes. However, the electric contact element design shown in FIG. 7 is intended to be merely illustrative. In another embodiment, the shoulder portion 764 may be of a steeper angle including a substantially vertical angle so as to be substantially normal to both the flange 762 and the substrate seating surface 768. Alternatively, the electric contact element 466 may be substantially planar thereby eliminating the shoulder portion 764. However, for reasons described below, a preferred embodiment comprises the shoulder portion 764 shown in FIG. 6 or some variation thereof.

[0074] The conducting members 765 are defined by a plurality of outer electrical contact pads 780 annularly disposed on the flange 762, a plurality of inner electrical contact pads 772 disposed on a portion of the substrate seating surface 768, and a plurality of embedded conducting connectors 776 which link the pads 772, 780 to one another. The conducting members 765 are isolated from one another by the insulative body 770. The insulative body may be made of a plastic such as polyvinylidenefluoride (PVDF), perfluoroalkoxy resin (PFA), Teflon® (a registered trademark of the E. l. duPont de Nemours and Company) and Tefzel™, or any other insulating material such as Alumina (Al₂O₃) or other ceramics. The outer contact pads 780 are coupled to a power supply (not shown) to deliver current and voltage to the inner contact pads 772 via the connectors 776 during processing. In turn, the inner contact pads 772 supply the current and voltage to a substrate by maintaining contact around a peripheral portion of the substrate. Thus, in operation the conducting members 765 act as discrete current paths electrically connected to a substrate.

[0075] Low resistivity, and conversely high conductivity, are directly related to good plating. To ensure low resistivity, the conducting members 765 are preferably made of copper (Cu), platinum (Pt), tantalum (Ta), titanium (Ti), gold (Au), silver (Ag), stainless steel or other conducting materials. Low resistivity and low contact resistance may also be achieved by coating the conducting members 765 with a conducting material. Thus, the conducting members 765 may, for example, be made of copper (resistivity for copper is approximately 2×10⁻⁸ Ω·m) and be coated with platinum (resistivity for platinum is approximately 10.6×10⁻⁸ Ω·m). Coatings such as tantalum nitride (TaN), titanium nitride (TiN), rhodium (Rh), Au, Cu, or Ag on a conductive base materials such as stainless steel, molybdenum (Mo), Cu, and Ti are also possible. Further, since the contact pads 772, 780 are typically separate units bonded to the conducting connectors 776, the contact pads 772, 780 may comprise one material, such as Cu, and the conducting members 765 another, such as stainless steel. Either or both of the pads 772, 180 and conducting connectors 776 may be coated with a conducting material. Additionally, because plating repeatability may be adversely affected by oxidation that acts as an insulator, the inner contact pads 772 preferably comprise a material resistant to oxidation such as Pt, Ag, or Au.

[0076] In addition to being a function of the contact material, the total resistance of each circuit is dependent on the geometry, or shape, of the inner contact inner contact pads 772 and the force supplied by the contact ring 466. These factors define a constriction resistance, R_(CR), at the interface of the inner contact pads 772 and the substrate seating surface 768 due to asperities between the two surfaces. Generally, as the applied force is increased the apparent area is also increased. The apparent area is, in turn, inversely related to R_(CR) so that an increase in the apparent area results in a decreased R_(CR). Thus, to minimize overall resistance it is preferable to maximize force. The maximum force applied in operation is limited by the yield strength of a substrate which may be damaged under excessive force and resulting pressure. However, because pressure is related to both force and area, the maximum sustainable force is also dependent on the geometry of the inner contact pads 772. Thus, while the contact pads 772 may have a flat upper surface as in FIG. 7, other shapes may be used to advantage. For example, two preferred shapes are shown in FIGS. 8 and 9. FIG. 8 shows a knife-edge contact pad and FIG. 9 shows a hemispherical contact pad. A person skilled in the art will readily recognize other shapes which may be used to advantage. A more complete discussion of the relation between contact geometry, force, and resistance is given in Ney Contact Manual, by Kenneth E. Pitney, The J. M. Ney Company, 1973, which is hereby incorporated by reference in its entirety.

[0077] The number of connectors 776 may be varied depending on the particular number of contact pads 772 (shown in FIG. 7) desired. For a 200 mm substrate, preferably at least twenty-four connectors 776 are spaced equally over 360°. However, as the number of connectors reaches a critical level, the compliance of the substrate relative to the contact ring 466 is adversely affected. For symmetry, it may be desired to provide a number of conductors that can be equally spaced about the perimeter of the substrate. For instance, a multiple number of eight conductors (8, 16, 24, etc) may be used since this provides an easily determinable and measurable angle between the conductors. Therefore, while more than twenty-four connectors 776 may be used, contact uniformity may eventually diminish depending on the topography of the contact pads 772 and the substrate stiffness. Similarly, while less than twenty-four connectors 776 may be used, current flow is increasingly restricted and localized, leading to poor plating results. Since the dimensions of the process cell can be configured to suit a particular application. For example, the dimensions would be changed to compensate between a 200 and a 300 mm substrate.

[0078] As shown in FIG. 10, the substrate seating surface 768 comprises an isolation gasket 782. The isolation gasket is disposed on the insulative body 770 and extends diametrically interior to the inner contact pads 772 to define the inner diameter of the contact ring 466. The isolation gasket 782 preferably extends slightly above the inner contact pads 772 (e.g., a few mils) and preferably comprises an elastomer such as VITON® (a registered trademark of the E. l. duPont de Nemours and Company of Wilmington, Del.), TEFLON® (a registered trademark of the E. l. duPont de Nemours and Company of Wilmington, Del.), buna rubber and the like. Where the insulative body 770 also comprises an elastomer the isolation gasket 782 may be of the same material. In the latter embodiment, the isolation gasket 782 and the insulative body 770 may be monolithic, i.e., formed as a single piece. However, the isolation gasket 782 is preferably separate from the insulative body 770 so that it may be easily removed for replacement or cleaning.

[0079] While FIG. 10 shows a preferred embodiment of the isolation gasket 782 wherein the isolation gasket is seated entirely on the insulative body 770, FIGS. 8 and 9 show an alternative embodiment. In the latter embodiment, the insulative body 770 is partially machined away to expose the upper surface of the connecting member 776 and the isolation gasket 782 is disposed thereon. Thus, the isolation gasket 782 contacts a portion of the connecting member 776. This design requires less material to be used for the inner contact pads 772 that may be advantageous where material costs are significant such as when the inner contact pads 772 comprise gold.

[0080] During processing, the isolation gasket 782 maintains contact with a peripheral portion of the substrate plating surface and is compressed to provide a seal between the remaining electric contact element 466 and the substrate. The seal prevents the electrolyte solution from contacting the edge and backside of the substrate. As noted above, maintaining a clean contact surface is necessary to achieving high plating repeatability. Previous contact ring designs did not provide consistent plating results because contact surface topography varied over time. The contact ring limits, or substantially minimizes, deposits which would otherwise accumulate on the inner contact pads 772 and change their characteristics thereby producing highly repeatable, consistent, and uniform plating across the substrate plating surface.

[0081]FIG. 11 is a simplified schematic diagram representing a possible configuration of the electrical circuit for the contact ring 466. To provide a uniform current distribution between the conducting members 765, an external resistor 700 is connected in series with each of the conducting members 765. Preferably, the resistance value of the external resistor 700 (represented as R_(EXT)) is much greater than the resistance of any other component of the circuit. As shown in FIG. 11, the electrical circuit through each conducting member 765 is represented by the resistance of each of the components connected in series with the power supply 702. R_(E) represents the resistance of the electrolyte solution, which is typically dependent on the distance between the anode and the cathode contact ring and the chemical composition of the electrolyte solution. Thus, R_(A) represents the resistance of the electrolyte solution adjacent the substrate plating surface 754. R_(S) represents the resistance of the substrate plating surface 754, and R_(C) represents the resistance of the cathode conducting members 765 plus the constriction resistance resulting at the interface between the inner contact pads 772 and the substrate plating layer 754. Generally, the resistance value of the external resistor (R_(EXT)) is at least as much as ΣR (where ΣR equals the sum of R_(E), R_(A), R_(S) and R_(C)). Preferably, the resistance value of the external resistor (R_(EXT)) is much greater than ΣR such that ΣR is negligible and the resistance of each series circuit approximates R_(EXT).

[0082] Typically, one power supply is connected to all of the outer contact pads 780 of the electric contact element 466, resulting in parallel circuits through the inner contact pads 772. However, as the inner contact pad-to-substrate interface resistance varies with each inner contact pad 772, more current will flow, and thus more plating will occur, at the site of lowest resistance. However, by placing an external resistor in series with each conducting member 765, the value or quantity of electrical current passed through each conducting member 765 becomes controlled mainly by the value of the external resistor. As a result, the variations in the electrical properties between each of the inner contact pads 772 do not affect the current distribution on the substrate. The uniform current density applied across the plating surface contributes to a uniform plating thickness of the metal film deposited on the seed layer on the substrate. The external resistors also provide a uniform current distribution between different substrates of a process-sequence.

[0083] Although the contact ring 466 is designed to resist deposit buildup on the inner contact pads 772, over multiple substrate plating cycles the substrate-pad interface resistance may increase, eventually reaching an unacceptable value. An electronic sensor/alarm 704 can be connected across the external resistor 700 to monitor the voltage/current across the external resistor to address this problem. If the voltage/current across the external resistor 700 falls outside of a preset operating range that is indicative of a high substrate-pad resistance, the sensor/alarm 704 triggers corrective measures such as shutting down the plating process until the problems are corrected by an operator. Alternatively, a separate power supply can be connected to each conducting member 765 and can be separately controlled and monitored to provide a uniform current distribution across the substrate. A very smart system (VSS) may also be used to modulate the current flow. The VSS typically comprises a processing unit and any combination of devices known in the industry used to supply and/or control current such as variable resistors, separate power supplies, etc. As the physiochemical, and hence electrical, properties of the inner contact pads 772 change over time, the VSS processes and analyzes data feedback. The data is compared to pre-established setpoints and the VSS then makes appropriate current and voltage alterations to ensure uniform deposition.

[0084]FIG. 18 is a perspective view of an alternative embodiment of a cathode contact ring. The cathode contact ring 1800 as shown in FIG. 18 comprises a conductive metal or a metal alloy, such as stainless steel, copper, silver, gold, platinum, titanium, tantalum, and other conductive materials, or a combination of conductive materials, such as stainless steel coated with platinum. The cathode contact ring 1800 includes an upper mounting portion 1810 adapted for mounting the cathode contact ring onto the substrate holder assembly and a lower substrate receiving portion 1820 adapted for receiving a substrate therein. The substrate receiving portion 1820 includes an annular substrate seating surface 1822 having a plurality of contact pads or bumps 1824 disposed thereon and preferably evenly spaced apart. When a substrate is positioned on the substrate seating surface 1822, the contact pads 1824 physically contact a peripheral region of the substrate to provide electrical contact to the seed layer formed on the substrate. Preferably, the contact pads 1824 are coated with a noble metal, such as platinum or gold, that is resistant to oxidation.

[0085] The exposed surfaces of the cathode contact ring, except the surfaces of the contact pads that come in contact with the substrate, are preferably treated to provide hydrophilic surfaces or coated with a material that exhibits hydrophilic properties. Hydrophilic materials and hydrophilic surface treatments are known in the art. One company providing a hydrophilic surface treatment is Millipore Corporation, located in Bedford, Massachusetts. The hydrophilic surface significantly reduces beading of the electrolyte solution on the surfaces of the cathode contact ring and promotes smooth dripping of the electrolyte solution from the cathode contact ring after the cathode contact ring is removed from the electroplating bath or electrolyte solution. By providing hydrophilic surfaces on the cathode contact ring that facilitate run-off of the electrolyte solution, plating defects caused by residual electrolyte solution on the cathode contact ring are significantly reduced. The inventors also contemplate application of this hydrophilic treatment or coating in other embodiments of cathode contact rings to reduce residual electrolyte solution beading on the cathode contact ring and the plating defects on a subsequently processed substrate that may result therefrom.

[0086] Referring to FIGS. 12 and 12A, the substrate holder 464 is preferably positioned above the electric contact element 466 and comprises a bladder assembly 470 that provides pressure to the backside of a substrate and ensures electrical contact between the substrate plating surface and the electric contact element 466. The inflatable bladder assembly 470 is disposed on a substrate holder plate 832. A bladder 836 disposed on a lower surface of the substrate holder plate 832 is thus located opposite and adjacent to the contacts on the electric contact element 466 with the substrate 821 interposed therebetween. A fluid source 838 supplies a fluid, i.e., a gas or liquid, to the bladder 836 allowing the bladder 836 to be inflated to varying degrees.

[0087] Referring now to FIGS. 12, 12A, and 13, the details of the bladder assembly 470 will be discussed. The substrate holder plate 832 is shown as substantially disc-shaped having an annular recess 840 formed on a lower surface and a centrally disposed vacuum port 841. One or more inlets 842 are formed in the substrate holder plate 832 and lead into the relatively enlarged annular mounting channel 843 and the annular recess 840. Quick-disconnect hoses 844 couple the fluid source 838 to the inlets 842 to provide a fluid thereto. The vacuum port 841 is preferably attached to a vacuum/pressure pumping system 859 adapted to selectively supply a pressure or create a vacuum at a backside of the substrate 821. The pumping system 859, shown in FIG. 12, comprises a pump 858, a cross-over valve 847, and a vacuum ejector 849 (commonly known as a venturi). One vacuum ejector that may be used is available from SMC Pneumatics, Inc., of Indianapolis, Indiana. The pump 858 may be a commercially available compressed gas source and is coupled to one end of a hose 847, the other end of the hose 847 being coupled to the vacuum port 841. The hose 847 is split into a pressure line 853 and a vacuum line 855 having the vacuum ejector 849 disposed therein. Fluid flow is controlled by the cross-over valve 847 which selectively switches communication with the pump 858 between the pressure line 853 and the vacuum line 855. Preferably, the cross-over valve has an OFF setting whereby fluid is restricted from flowing in either direction through hose 847. A shut-off valve 861 disposed in hose 847 prevents fluid from flowing from pressure line 855 upstream through the vacuum ejector 849. The desired direction of fluid flow is indicated by arrows.

[0088] Where the fluid source 838 is a gas supply it may be coupled to hose 847 thereby eliminating the need for a separate compressed gas supply, i.e., pump 858. Further, a separate gas supply and vacuum pump may supply the backside pressure and vacuum conditions. While it is preferable to allow for both a backside pressure as well as a backside vacuum, a simplified embodiment may comprise a pump capable of supplying only a backside vacuum. However, as will be explained below, deposition uniformity may be improved where a backside pressure is provided during processing. Therefore, an arrangement such as the one described above including a vacuum ejector and a cross-over valve is preferred.

[0089] Referring now to FIGS. 12A and 14, a substantially circular ring-shaped manifold 846 is disposed in the annular recess 840. The manifold 846 comprises a mounting rail 852 disposed between an inner shoulder 848 and an outer shoulder 850. The mounting rail 852 is adapted to be at least partially inserted into the annular mounting channel 843. A plurality of fluid outlets 854 formed in the manifold 846 provide communication between the inlets 842 and the bladder 836. Seals 837, such as O-rings, are disposed in the annular manifold channel 843 in alignment with the inlet 842 and outlet 854 and secured by the substrate holder plate 832 to ensure an airtight seal. Conventional fasteners (not shown) such as screws may be used to secure the manifold 846 to the substrate holder plate 832 via cooperating threaded bores (not shown) formed in the manifold 846 and the substrate holder plate 832.

[0090] Referring now to FIG. 15, the bladder 836 is shown, in section, as an elongated substantially semi-tubular piece of material having annular lip seals 856, or nodules, at each edge. In FIG. 12A, the lip seals 856 are shown disposed on the inner shoulder 848 and the outer shoulder 850. A portion of the bladder 836 is compressed against the walls of the annular recess 840 by the manifold 846 which has a width slightly less (e.g. a few millimeters) than the annular recess 840. Thus, the manifold 846, the bladder 836, and the annular recess 840 cooperate to form a fluid-tight seal. To prevent fluid loss, the bladder 836 is preferably comprised of some fluid impervious material such as silicon rubber or any comparable elastomer which is chemically inert with respect to the electrolyte solution and exhibits reliable elasticity. Where needed a compliant covering 857 may be disposed over the bladder 836, as shown in FIG. 15, and secured by means of an adhesive or thermal bonding. The covering 857 preferably comprises an elastomer such as Viton™, buna rubber or the like, which may be reinforced by KEVLAR® (a registered trademark of the E. l. DuPont de Nemours and Company of Wilmington, Del.), for example. In one embodiment, the covering 857 and the bladder 836 comprise the same material. The covering 857 has particular application where the bladder 836 is susceptible to rupturing. Alternatively, the bladder 836 thickness may simply be increased during its manufacturing to reduce the likelihood of puncture. Preferably, the exposed surface of the bladder 836 (if uncovered) and the exposed surface of the covering 857 are coated or treated to provide a hydrophilic surface (as discussed above for the surfaces of the cathode contact ring). This coating promotes dripping and removal of the residual electrolyte solution after the head assembly is lifted above the process cell.

[0091] The precise number of inlets 842 and outlets 854 may be varied according to the particular application. For example, while FIG. 12 shows two inlets with corresponding outlets, an alternative embodiment could employ a single fluid inlet that supplies fluid to the bladder 836.

[0092] In operation, the substrate 821 is introduced into the container body 802 by securing it to the lower side of the substrate holder plate 832. This is accomplished by engaging the pumping system 859 to evacuate the space between the substrate 821 and the substrate holder plate 832 via port 841 thereby creating a vacuum condition. The bladder 836 is then inflated by supplying a fluid such as air or water from the fluid source 838 to the inlets 842. The fluid is delivered into the bladder 836 via the manifold outlets 854, thereby pressing the substrate 821 uniformly against the contacts of the electric contact element 466. The electroplating process is then carried out. Electrolyte solution is then pumped into the process cell 420 toward the substrate 821 to contact the exposed substrate plating surface 820. The power supply provides a negative bias to the substrate plating surface 820 via the electric contact element 466. As the electrolyte solution is flowed across the substrate plating surface 820, ions in the electrolytic solution are attracted to the surface 820 and deposit on the surface 820 to form the desired film.

[0093] Because of its flexibility, the bladder 836 deforms to accommodate the asperities of the substrate backside and contacts of the electric contact element 466 thereby mitigating misalignment with the conducting electric contact element 466. The compliant bladder 836 prevents the electrolyte solution from flowing to the backside of the substrate 821 by establishing a fluid tight seal at a portion close to the perimeter of a backside of the substrate 821. Once inflated, a uniform pressure is delivered downward toward the electric contact element 466 to achieve substantially equal force at all points where the substrate 821 and electric contact element 466 interface. The force can be varied as a function of the pressure supplied by the fluid source 838. Further, the effectiveness of the bladder assembly 470 is not dependent on the configuration of the electric contact element 466. For example, while FIG. 12 shows a pin configuration having a plurality of discrete contact points, the electric contact element 466 may also be a continuous surface.

[0094] Because the force delivered to the substrate 821 by the bladder 836 is variable, adjustments can be made to the current flow supplied by the contact ring 466. As described above, an oxide layer may form on the electric contact element 466 and act to restrict current flow. However, increasing the pressure of the bladder 836 may counteract the current flow restriction due to oxidation. As the pressure is increased, the malleable oxide layer is compromised and superior contact between the electric contact element 466 and the substrate 821 results. The effectiveness of the bladder 836 in this capacity may be further improved by altering the geometry of the electric contact element 466. For example, a knife-edge geometry is likely to penetrate the oxide layer more easily than a dull rounded edge or flat edge.

[0095] Additionally, the fluid tight seal provided by the inflated bladder 836 allows the pump 858 to maintain a backside vacuum or pressure either selectively or continuously, before, during, and after processing. Generally, however, the pump 858 is run to maintain a vacuum only during the transfer of substrates to and from the electroplating process cell 400 because it has been found that the bladder 836 is capable of maintaining the backside vacuum condition during processing without continuous pumping. Thus, while inflating the bladder 836, as described above, the backside vacuum condition is simultaneously relieved by disengaging the pumping system 859, e.g., by selecting an off position on the cross-over valve 847. Disengaging the pumping system 859 may be abrupt or comprise a gradual process whereby the vacuum condition is ramped down. Ramping allows for a controlled exchange between the inflating bladder 836 and the simultaneously decreasing backside vacuum condition. This exchange may be controlled manually or by computer.

[0096] As described above, continuous backside vacuum pumping while the bladder 836 is inflated is not needed and may actually cause the substrate 820 to buckle or warp leading to undesirable deposition results. It may be desirable to provide a backside pressure to the substrate 820 in order to cause a “bowing” effect of the substrate to be processed. Bowing of the substrate may results in superior deposition on the substrate. Thus, pumping system 859 is capable of selectively providing a vacuum or pressure condition to the substrate backside. For a 200 mm substrate a backside pressure up to 5 psi is preferable to bow the substrate. Because substrates typically exhibit some measure of pliability, a backside pressure causes the substrate to bow or assume a convex shape relative to the upward flow of the electrolyte solution. The degree of bowing is variable according to the pressure supplied by pumping system 859.

[0097] Those skilled in the art will readily recognize other embodiments. For example, while FIG. 12A shows a preferred bladder 836 having a surface area sufficient to cover a relatively small perimeter portion of the substrate backside at a diameter substantially equal to the electric contact element 466. The geometric configuration of the bladder assembly 470 can be varied. Thus, the bladder assembly may be constructed using more fluid impervious material to cover an increased surface area of the substrate 821.

[0098]FIG. 19 is a partial cross sectional view of an alternative embodiment of a substrate holder assembly. The alternative substrate holder assembly 1900 comprises a bladder assembly 470, as described above, having the inflatable bladder 836 attached to the back surface of an intermediary substrate holder plate 1910. Preferably, a portion of the inflatable bladder 836 is sealingly attached to the back surface 1912 of the intermediary substrate holder plate 1910 using an adhesive or other bonding material. The front surface 1914 of the intermediary substrate holder plate 1910 is adapted to receive a substrate 821 to be processed. An elastomeric o-ring 1916 is disposed in an annular groove 1918 on the front surface 1914 of the intermediary substrate holder plate 1910 to contact a peripheral portion of the substrate back surface. The elastomeric o-ring 1916 provides a seal between the substrate back surface and the front surface of the intermediary substrate holder plate. Preferably, the intermediary substrate holder plate includes a plurality of bores or holes 1920 extending through the plate that are in fluid communication with the vacuum port 841. The plurality of holes 1920 facilitate securing the substrate on the substrate holder using a vacuum force applied to the backside of the substrate. According to this alternative embodiment of the substrate holder assembly, the inflatable bladder does not directly contact a substrate being processed, and thus the risk of cutting or damaging the inflatable bladder during substrate transfers is significantly reduced. The elastomeric O-ring 1916 is preferably coated or treated to provide a hydrophilic surface (as discussed above for the surfaces of the cathode contact ring) for contacting the substrate. The elastomeric O-ring 1916 is replaced as needed to ensure proper contact and seal to the substrate.

[0099]FIG. 25 is an alternative embodiment of the process head assembly having a rotatable head assembly 2410. Preferably, a rotational actuator is disposed on the cantilevered arm and attached to the head assembly to rotate the head assembly during substrate processing. The rotatable head assembly 2410 is mounted onto a head assembly frame 2452. The alternative head assembly frame 2452 and the rotatable head assembly 2410 are mounted onto the mainframe similarly to the head assembly frame 452 and head assembly 410 as shown in FIG. 6 and described above. The head assembly frame 2452 includes a mounting post 2454, a post cover 2455, and a cantilever arm 2456. The mounting post 2454 is mounted onto the body of the mainframe 214, and the post cover 2455 covers a top portion of the mounting post 2454. Preferably, the mounting post 2454 provides rotational movement (as indicated by arrow Al) with respect to a vertical axis along the mounting post to allow rotation of the head assembly frame 2452. The cantilever arm 2456 extends laterally from an upper portion of the mounting post 2454 and is pivotally connected to the post cover 2455 at the pivot joint 2459. The rotatable head assembly 2410 is attached to a mounting slide 2460 disposed at the distal end of the cantilever arm 2456. The mounting slide 2460 guides the vertical motion of the head assembly 2410. A head lift actuator 2458 is disposed on top of the mounting slide 2460 to provide vertical displacement of the head assembly 2410.

[0100] The lower end of the cantilever arm 2456 is connected to the shaft 2453 of a cantilever arm actuator 2457, such as a pneumatic cylinder or a lead-screw actuator, mounted on the mounting post 2454. The cantilever arm actuator 2457 provides pivotal movement (as indicated by arrow A2) of the cantilever arm 2456 with respect to the joint 2459 between the cantilever arm 2456 and the post cover 2454. When the cantilever arm actuator 2457 is retracted, the cantilever arm 2456 moves the head assembly 2410 away from the process cell 420. The movement of the head assembly 2410 provides the spacing required to remove and/or replace the substrate from the electroplating process cell 240. When the cantilever arm actuator 2457 is extended, the cantilever arm 2456 moves the head assembly 2410 toward the process cell 420 to position the substrate in the head assembly 2410 in a processing position.

[0101] The rotatable head assembly 2410 includes a rotating actuator 2464 slideably connected to the mounting slide 2460. The shaft 2468 of the head lift actuator 2458 is inserted through a lift guide 2466 attached to the body of the rotating actuator 2464. Preferably, the shaft 2468 is a lead-screw type shaft that moves the lift guide (as indicated by arrows A3) between various vertical positions. The rotating actuator 2464 is connected to the substrate holder assembly 2450 through the shaft 2470 and rotates the substrate holder assembly 2450 (as indicated by arrows A4). The substrate holder assembly 2450 includes a bladder assembly, such as the embodiments described above with respect to FIGS. 12-15 and 19, and a cathode contact ring, such as the embodiments described above with respect to FIGS. 7-10 and 18.

[0102] The rotation of the substrate during the electroplating process generally enhances the deposition results. Preferably, the head assembly is rotated between about 2 rpm and about 200 rpm (preferably between about 20 and 40 rpm), during the electroplating process. The substrate holder assembly 2472 can be rotated to impart rotation to the substrate as the substrate holder device 14 lowers the seed layer on the substrate into contact with the electrolyte solution in the process cell. The head assembly is raised to remove the seed layer on the substrate from the electrolyte solution in the process cell. The head assembly is preferably rotated at a high speed (i.e., between about 100 and about 2500 rpm) after the head assembly is lifted from the process cell to enhance removal of residual electrolyte solution from the head assembly by inertial force.

[0103] In one embodiment, the uniformity of the deposited film has been improved within about 2% (i.e., maximum deviation of deposited film thickness is at about 2% of the average film thickness) while standard electroplating processes typically achieves uniformity at best within about 5.5%. However, rotation of the head assembly is not necessary to achieve uniform electroplating deposition in some instances, particularly where the uniformity of electroplating deposition is achieved by adjusting the processing parameters, such as the chemicals in the electrolyte solution, electrolyte solution flow and other parameters.

[0104] Referring back to FIG. 6, a cross sectional view of an electroplating process cell 400, the substrate holder assembly 450 is positioned above the process cell 420. The process cell 420 generally comprises a bowl 430, a container body 472, an anode assembly 474 and a filter 476. Preferably, the anode assembly 474 is disposed below the container body 472 and attached to a lower portion of the container body 472, and the filter 476 is disposed between the anode assembly 474 and the container body 472. The container body 472 is preferably a cylindrical body comprised of an electrically insulative material, such as ceramics, plastics, PLEXIGLAS® (acrylic), lexane, PVC, CPVC, and PVDF. Alternatively, the container body 472 can be made from a coated metal, such as stainless steel, nickel and titanium. The coated metal is coated with an insulating layer (such as TEFLON® [a trademark of the E. l. duPont de Nemoirs Company of Wilmington, Del.], PVDF, plastic, rubber and other combinations of materials) that do not dissolve in the electrolyte solution. The insulating layer can be electrically insulated from the electrodes (i.e., the anode and cathode of the electroplating system). The container body 472 is preferably sized and adapted to conform to the substrate plating surface and the shape of a substrate being processed through the system, typically circular or rectangular in shape. One preferred embodiment of the container body 472 comprises a cylindrical ceramic tube having an inner diameter that has about the same dimension as or slightly larger than the substrate diameter. The inventors have discovered that the rotational movement typically required in typical electroplating systems is not required to achieve uniform plating results when the size of the container body conforms to about the size of the substrate plating surface.

[0105] An upper portion of the container body 472 extends radially outwardly to form an annular weir 478. The weir 478 extends over the inner wall 446 of the electrolyte solution collector 440 and allows the electrolyte solution to flow into the electrolyte solution collector 440. The upper surface of the weir 478 preferably matches the lower surface of the electric contact element 466. Preferably, the upper surface of the weir 478 includes an inner annular flat portion 480, a middle inclined portion 482 and an outer declined portion 484. When a substrate is positioned in the processing position, the substrate plating surface is positioned above the cylindrical opening of the container body 472. A gap for electrolyte solution flow is formed between the lower surface of the electric contact element 466 and the upper surface of the weir 478. The lower surface of the electric contact element 466 is disposed above the inner flat portion 480 and the middle inclined portion of the weir 478. The outer declined portion 484 is sloped downwardly to facilitate flow of the electrolyte solution into the electrolyte solution collector 440.

[0106] A lower portion of the container body 472 extends radially outwardly to form a lower annular flange 486 for securing the container body 472 to the bowl 430. The outer dimension (i.e., circumference) of the annular flange 486 is smaller than the dimensions of the opening 444 and the inner circumference of the electrolyte solution collector 440. The smaller dimension of the annular flange to allow removal and replacement of the process cell 420 from the electroplating process cell 400. Preferably, multiple bolts 488 are fixedly disposed on the annular flange 486 and extend downwardly through matching bolt holes on the bowl 430. A plurality of removable fastener nuts 490 secure the process cell 420 onto the bowl 430. A seal 487, such as an elastomer O-ring, is disposed between container body 472 and the bowl 430 radially inwardly from the bolts 488 to prevent leaks from the process cell 420. The nuts/bolts combination facilitates fast and easy removal and replacement of the components of the process cell 420 during maintenance.

[0107] Preferably, the filter 476 is attached to and completely covers the lower opening of the container body 472, and the anode assembly 474 is disposed below the filter 476. A spacer 492 is disposed between the filter 476 and the anode assembly 474. Preferably, the filter 476, the spacer 492, and the anode assembly 474 are fastened to a lower surface of the container body 472 using removable fasteners, such as screws and/or bolts. Alternatively, the filter 476, the spacer 492, and the anode assembly 474 are removably secured to the bowl 430.

[0108] The anode assembly 474 preferably comprises a consumable anode that serves as a metal source in the electrolyte solution. Alternatively, the anode assembly 474 comprises a non-consumable anode, and the metal to be electroplated is supplied within the electrolyte solution from the electrolyte solution replenishing system 220. As shown in FIG. 6, the anode assembly 474 is a self-enclosed module having a porous anode enclosure 494 preferably made of the same metal as the metal to be electroplated, such as copper. Alternatively, the anode enclosure 494 is made of porous materials, such as ceramics or polymeric membranes. A soluble metal 496, such as high purity copper for electrochemical plating of copper, is disposed within the anode enclosure 494. The soluble metal 496 preferably comprises metal particles, wires or a perforated sheet. The porous anode enclosure 494 also acts as a filter that keeps the particulates generated by the dissolving metal within the anode enclosure 494. As compared to a non-consumable anode, the consumable (i.e., soluble) anode provides gas-generation-free electrolyte solution and minimizes the need to constantly replenish the metal in the electrolyte solution.

[0109] An anode electrode contact 498 is inserted through the anode enclosure 494 to provide electrical connection to the soluble metal 496 from a power supply. Preferably, the anode electrode contact 498 is made from a conductive material that is insoluble in the electrolyte solution, such as titanium, platinum and platinum-coated stainless steel. The anode electrode contact 498 extends through the bowl 430 and is connected to an electrical power supply. Preferably, the anode electrical contact 498 includes a threaded portion 497 (for a fastener nut 499 to secure the anode electrical contact 498 to the bowl 430), and a seal 495 (such as a elastomer washer, is disposed between the fastener nut 499 and the bowl 430 to prevent leaks from the process cell 420).

[0110] The bowl 430 generally comprises a cylindrical portion 502 and a bottom portion 504. An upper annular flange 506 extends radially outwardly from the top of the cylindrical portion 502. The upper annular flange 506 includes a plurality of holes 508 that matches the number of bolts 488 from the lower annular flange 486 of the container body 472. Bolts 488 are inserted through the holes 508, and the fastener nuts 490 are fastened onto the bolts 488 that secure the upper annular flange 506 of the bowl 430 to the lower annular flange 486 of the container body 472. Preferably, the outer dimension (i.e., circumference) of the upper annular flange 506 is about the same as the outer dimension (i.e., circumference) of the lower annular flange 486. Preferably, the lower surface of the upper annular flange 506 of the bowl 430 rests on a support flange of the mainframe 214 when the process cell 420 is positioned on the mainframe 214.

[0111] The inner circumference of the cylindrical portion 502 accommodates the anode assembly 474 and the filter 476. Preferably, the outer dimensions of the filter 476 and the anode assembly 474 are slightly smaller than the inner dimension of the cylindrical portion 502. These relative dimensions force a substantial portion of the electrolyte solution to flow through the anode assembly 474 first before flowing through the filter 476. The bottom portion 504 of the bowl 430 includes an electrolyte solution inlet 510 that connects to an electrolyte solution supply line from the electrolyte solution replenishing system 220. Preferably, the anode assembly 474 is disposed about a middle portion of the cylindrical portion 502 of the bowl 430. The anode assembly 474 is configured to provide a gap for electrolyte solution flow between the anode assembly 474 and the electrolyte solution inlet 510 on the bottom portion 504.

[0112] The electrolyte solution inlet 510 and the electrolyte solution supply line are preferably connected by a releasable connector that facilitates easy removal and replacement of the process cell 420. When the process cell 420 needs maintenance, the electrolyte solution is drained from the process cell 420, and the electrolyte solution flow in the electrolyte solution supply line is discontinued and drained. The connector for the electrolyte solution supply line is released from the electrolyte solution inlet 510, and the electrical connection to the anode assembly 474 is also disconnected. The head assembly 410 is raised or rotated to provide clearance for removal of the process cell 420. The process cell 420 is then removed from the mainframe 214, and a new or reconditioned process cell is replaced into the mainframe 214.

[0113] Alternatively, the bowl 430 can be secured onto the support flange of the mainframe 214, and the container body 472 along with the anode and the filter are removed for maintenance. In this case, the nuts securing the anode assembly 474 and the container body 472 to the bowl 430 are removed to facilitate removal of the anode assembly 474 and the container body 472. New or reconditioned anode assembly 474 and container body 472 are then replaced into the mainframe 214 and secured to the bowl 430.

[0114]FIG. 20 is a cross sectional view of one embodiment of an encapsulated anode. The encapsulated anode 2000 includes a permeable anode enclosure that filters or traps “anode sludge” or particulates generated as the metal is dissolved from the anode plate 2004. As shown in FIG. 20, the anode plate 2004 comprises a solid piece of copper. Preferably, the anode plate 2004 is a high purity, oxygen free copper, enclosed in a hydrophilic anode encapsulation membrane 2002. The anode plate 2004 is secured and supported by a plurality of electrical contacts or feed-throughs 2006 that extend through the bottom of the bowl 430. The electrical contacts or feed-throughs 2006 extend through the anode encapsulation membrane 2002 into the bottom surface of the anode plate 2004. The flow of the electrolyte solution is indicated by the arrows A from the electrolyte solution inlet 510 disposed at the bottom of the bowl 430 through the gap between the anode and the bowl sidewall. The electrolyte solution also flows through the anode encapsulation membrane 2002 by permeation into and out of the gap between the anode encapsulation membrane and the anode plate, as indicated by the arrows B. Preferably, the anode encapsulation membrane 2002 comprises a hydrophilic porous membrane, such as a modified polyvinyllidene fluoride membrane, having porosity between about 60% and 80%, more preferably about 70%, and pore sizes between about 0.025 μm and about 1 μm, more preferably between about 0.1 μm and about 0.2 μm. One example of a hydrophilic porous membrane is the Durapore Hydrophilic Membrane, available from Millipore Corporation, located in Bedford, Mass. As the electrolyte solution flows through the encapsulation membrane, anode sludge and particulates generated by the dissolving anode are filtered or trapped by the encapsulation membrane. Thus, the encapsulation membranes improve the purity of the electrolyte solution during the electroplating process, and defect formations on the substrate during the electroplating process caused by anode sludge and other such particulates are significantly reduced.

[0115]FIG. 21 is a cross sectional view of another embodiment of an encapsulated anode. The anode plate 2004 is secured and supported on the electrical feed-throughs 2006. A top encapsulation membrane 2008 and a bottom encapsulation membrane 2010, disposed respectively above and below the anode plate 2004, are attached to a membrane support ring 2012 that is disposed around the anode plate 2004. The top and bottom encapsulation membranes 2008, 2010 comprise a material from the list above for encapsulation membrane of the first embodiment of the encapsulated anode. The membrane support ring 2012 preferably comprises a relatively rigid material (as compared to the encapsulation membrane), such as plastic or other polymers. A bypass fluid inlet 2014 is disposed through the bottom of the bowl 430 and through the bottom encapsulation membrane 2010 to introduce electrolyte solution into the gap between the encapsulation membranes and the anode plate. A bypass outlet 2016 is connected to the membrane support ring 2012 and extends through the bowl 430 to facilitate flow of excess electrolyte solution with the anode sludge or generated particulates out of the encapsulated anode into a waste drain (not shown).

[0116] Preferably, the flow of the electrolyte solution within the bypass fluid inlet 2014 and the main electrolyte solution inlet 510 is individually controlled by the flow control valves 2020, 2022. The individual flow control valves 2020, 2022 are respectively placed along the fluid lines connected to the inlets. The fluid pressure in the bypass fluid inlet 2014 is preferably maintained at a higher pressure than the pressure in the main electrolyte solution inlet 510. The flow of the electrolyte solution inside the bowl 430 from the main electrolyte solution inlet 510 is indicated by arrows A, and the flow of the electrolyte solution inside the encapsulated anode 2000 is indicated by the arrows B. A portion of the electrolyte solution introduced into the encapsulated anode flows out of the encapsulated anode through the bypass outlet 2016. By providing a dedicated bypass electrolyte solution supply into the encapsulated anode, the anode sludge or particulates generated from the dissolving anode is continually removed from the anode, thereby improving the purity of the electrolyte solution during the electroplating process.

[0117]FIG. 22 is a cross sectional view of another embodiment of an encapsulated anode. This embodiment of an encapsulated anode 2000 includes an anode plate 2004, a plurality of electrical feed-throughs 2006, a top and a bottom encapsulation membrane 2008, 2010, and a membrane support ring 2012. The anode plate 2004 is secured and supported on a plurality of electrical feed-throughs 2006. The top and a bottom encapsulation membranes 2008, 2010 are attached to a membrane support ring 2012. A bypass outlet 2016 connected to the membrane support ring 2012 and extending through the bowl 430. This embodiment of an encapsulated anode preferably comprises materials as described above for the first and second embodiments of an encapsulated anode. The bottom encapsulation membrane 2010 according to the third embodiment includes one or more openings 2024 disposed substantially above the main electrolyte solution inlet 510. The opening 2024 is adapted to receive flow of electrolyte solution from the main electrolyte solution inlet 510 and is preferably about the same size as the internal circumference of the main electrolyte solution inlet 510. The flow of the electrolyte solution from the main electrolyte solution inlet 510 is indicated by the arrows A and the flow of the electrolyte solution within the encapsulated anode is indicated by the arrows B. A portion of the electrolyte solution flows out of the encapsulated anode through the bypass outlet 2016, carrying a portion of the anode sludge and particulates generated from anode dissolution.

[0118]FIG. 23 is a cross sectional view of yet another embodiment of an encapsulated anode. This embodiment of an encapsulated anode includes an anode plate 2004, a plurality of electrical feed-throughs 2006, a top and a bottom encapsulation membrane 2008, 2010, and a membrane support ring 2012. The encapsulated anode 2000 includes an anode plate 2002 that is secured and supported on a plurality of electrical feed-throughs 2006. A top and a bottom encapsulation membrane 2008, 2010 are attached to a membrane support ring 2012. A bypass fluid inlet 2014 is disposed through the bottom of the bowl 430 and through the bottom encapsulation membrane 2010 to introduce electrolyte solution into the gap between the encapsulation membranes and the anode plate. Preferably, the flow of the electrolyte solution through the bypass fluid inlet 2014 and the main electrolyte solution inlet 510 is individually controlled by control valves 2020, 2022, respectively. The flow of the electrolyte solution from the main electrolyte solution inlet 510 is indicated by the arrows A. The flow of the electrolyte solution through the encapsulated anode is indicated by arrows B. For this embodiment, the anode sludge and particulates generated by the dissolving anode plate are filtered and trapped by the encapsulation membranes as the electrolyte solution passes through the membrane.

[0119]FIG. 16 is a schematic diagram of an electrolyte solution replenishing system 220. The electrolyte solution replenishing system 220 provides the electrolyte solution to the electroplating process cells for the electroplating process. The electrolyte solution replenishing system 220 generally comprises a main electrolyte solution tank 602, a dosing module 603, a filtration module 605, a chemical analyzer module 616, and an electrolyte solution waste disposal system 622 connected to the analyzing module 616 by an electrolyte solution waste drain 620. One or more controllers control the composition of the electrolyte solution in the main tank 602 and the operation of the electrolyte solution replenishing system 220. Preferably, the controllers are independently operable but integrated with the controller 222 of the system platform 200.

[0120] The main electrolyte solution tank 602 provides a reservoir for electrolyte solution and includes an electrolyte solution supply line 612 that is connected to each of the electroplating process cells through one or more fluid pumps 608 and valves 607. A heat exchanger 624 or a heater/chiller disposed in thermal connection with the main tank 602 controls the temperature of the electrolyte solution stored in the main tank 602. The heat exchanger 624 is connected to and operated by the controller 610.

[0121] The dosing module 603 is connected to the main tank 602 by a supply line and includes a plurality of source tanks 606, or feed bottles, a plurality of valves 609, and a controller 611. The source tanks 606 contain the chemicals needed for composing the electrolyte solution and typically include a de-ionized water source tank and copper sulfate (CuSO₄) source tank for composing the electrolyte solution. Other source tanks 606 may contain hydrogen sulfate (H₂SO₄), hydrogen chloride (HCl) and various additives such as glycol. Each source tank is preferably color coded and fitted with a unique mating outlet connector adapted to connect to a matching inlet connector in the dosing module. By color coding the source tanks and fitting the source tanks with unique connectors, errors caused by human operators when exchanging or replacing the source tanks are significantly reduced.

[0122] The de-ionized water source tank preferably also provides de-ionized water to the system for cleaning the system during maintenance. The valves 609 associated with each source tank 606 regulate the flow of chemicals to the main tank 602 and may be any of numerous commercially available valves such as butterfly valves, throttle valves and the like. Activation of the valves 609 is accomplished by the controller 611 which is preferably connected to the controller 222 to receive signals therefrom.

[0123] The electrolyte solution filtration module 605 includes a plurality of filter tanks 604. An electrolyte solution return line 614 is connected between each of the process cells and one or more filter tanks 604. The filter tanks 604 remove the undesired contents in the used electrolyte solution before returning the electrolyte solution to the main tank 602 for re-use. The main tank 602 is also connected to the filter tanks 604 to facilitate re-circulation and filtration of the electrolyte solution in the main tank 602. By re-circulating the electrolyte solution from the main tank 602 through the filter tanks 604, the undesired contents in the electrolyte solution are continuously removed by the filter tanks 604 to maintain a consistent level of purity. Additionally, re-circulating the electrolyte solution between the main tank 602 and the filtration module 605 allows the various chemicals in the electrolyte solution to be thoroughly mixed.

[0124] The electrolyte solution replenishing system 220 also includes a chemical analyzer module 616 that provides real-time chemical analysis of the chemical composition of the electrolyte solution. The analyzer module 616 is fluidly coupled to the main tank 602 by a sample line 613 and to the waste disposal system 622 by an outlet line 621. The analyzer module 616 generally comprises at least one analyzer and a controller to operate the analyzer. The number of analyzers required for a particular processing tool depends on the composition of the electrolyte solution. For example, while a first analyzer may be used to monitor the concentrations of organic substances, a second analyzer is needed for inorganic chemicals. In the specific embodiment shown in FIG. 16 the chemical analyzer module 616 comprises an auto titration analyzer 615 and a cyclic voltametric stripper (CVS) 617. Both analyzers are commercially available from various suppliers. An auto titration analyzer that may be used to advantage is available from Parker Systems and a cyclic voltametric stripper is available from ECI. The auto titration analyzer 615 determines the concentrations of inorganic substances such as copper chloride and acid. The CVS 617 determines the concentrations of organic substances such as the various additives which may be used in the electrolyte solution and by-products resulting from the processing which are returned to the main tank 602 from the process cells.

[0125] The analyzer module shown in FIG. 16 is merely illustrative. In another embodiment, each analyzer may be coupled to the main electrolyte solution tank by a separate supply line and be operated by separate controllers. Persons skilled in the art will recognize other embodiments.

[0126] In operation, a sample of electrolyte solution is flowed to the analyzer module 616 via the sample line 613. Although the sample may be taken periodically, preferably a continuous flow of electrolyte solution is maintained to the analyzer module 616. A portion of the sample is delivered to the auto titration analyzer 615 and a portion is delivered to the CVS 617 for the appropriate analysis. The controller 619 initiates command signals to operate the analyzers 615, 617 in order to generate data. The information from the chemical analyzers 615, 617 is then communicated to the controller 222. The controller 222 processes the information and transmits signals that include user-defined chemical dosage parameters to the dosing controller 611. The received information is used to provide real-time adjustments to the source chemical replenishment rates by operating one or more of the valves 609. The received information thereby maintains a desired, and preferably constant, chemical composition of the electrolyte solution throughout the electroplating process. The waste electrolyte solution from the analyzer module is then flowed to the waste disposal system 622 via the outlet line 621.

[0127] Although a preferred embodiment utilizes real-time monitoring and adjustments of the electrolyte solution, various alternatives may be employed. For example, the dosing module 603 may be controlled manually by an operator observing the output values provided by the chemical analyzer module 616. Preferably, the system software allows for both an automatic real-time adjustment mode as well as an operator (manual) mode. Further, although multiple controllers are shown in FIG. 16, a single controller may be used to operate various components of the system such as the chemical analyzer module 616, the dosing module 603, and the heat exchanger 624. Other embodiments will be apparent to those skilled in the art.

[0128] The electrolyte solution replenishing system 220 also includes an electrolyte solution waste drain 620 connected to an electrolyte solution waste disposal system 622 for safe disposal of used electrolyte solutions, chemicals and other fluids used in the electroplating system. Preferably, the electroplating cells include a direct line connection to the electrolyte solution waste drain 620 (or the electrolyte solution waste disposal system 622). The electrolyte solution waste drain 620 drains the electroplating cells without returning the electrolyte solution through the electrolyte solution replenishing system 220. The electrolyte solution replenishing system 220 preferably also includes a bleed off connection to bleed off excess electrolyte solution to the electrolyte solution waste drain 620.

[0129] Preferably, the electrolyte solution replenishing system 220 also includes one or more degasser modules 630 adapted to remove undesirable gases from the electrolyte solution. The degasser module generally comprises a membrane that separates gases from the fluid passing through the degasser module and a vacuum system for removing the released gases. The degasser modules 630 are preferably placed in line on the electrolyte solution supply line 612 adjacent to the process cells 240. The degasser modules 630 are preferably positioned as close as possible to the process cells 240 so most of the gases from the electrolyte solution replenishing system are removed by the degasser modules before the electrolyte solution enters the process cells. Preferably, each degasser module 630 includes two outlets to supply degassed electrolyte solution to the two process cells 240 of each processing station 218. Alternatively, a degasser module 630 is provided for each process cell. The degasser modules can be placed at many other alternative positions. For example, the degasser module can be placed at other positions in the electrolyte solution replenishing system, such as along with the filter section or in a closed-loop system with the main tank or with the process cell. As another example, one degasser module is placed in line with the electrolyte solution supply line 612 to provide degassed electrolyte solution to all of the process cells 240 of the electro-chemical plating system. Additionally, a separate degasser module is positioned in-line or in a closed-loop with the de-ionized water supply line and is dedicated for removing oxygen from the de-ionized water source. Because de-ionized water is used to rinse the processed substrates, free oxygen gases are preferable removed from the de-ionized water before reaching the SRD modules so that the electroplated copper is less likely to become oxidized by the rinsing process. Degasser modules are well known in the art and commercial embodiments are generally available and adaptable for use in a variety of applications. A commercially available degasser module is available from Millipore Corporation, located in Bedford, Mass.

[0130] One embodiment of the degasser module 630, as shown in FIG. 26a, includes a hydrophobic membrane 632 having a fluid (i.e., electrolyte solution) passage 634 on one side of the membrane 632. A vacuum system 636 disposed on the opposite side of the membrane. The enclosure 638 of the degasser module includes an inlet 640 and one or more outlets 642. As the electrolyte solution passes through the degasser module 630, the gases and other micro-bubbles in the electrolyte solution are separated from the electrolyte solution through the hydrophobic membrane and removed by the vacuum system. Another embodiment of the degasser module 630′, as shown in FIG. 26b, includes a tube of hydrophobic membrane 632′ and a vacuum system 636 disposed around the tube of hydrophobic membrane 632′. The electrolyte solution is introduced inside the tube of hydrophobic membrane, and as the electrolyte solution passes through the fluid passage 634 in the tube. The hydrophobic membrane separates gases and other micro-bubbles in the electrolyte solution, and a tube that is connected to the vacuum system 636 removes the separated gasses. More complex designs of degasser modules are contemplated, including designs having serpentine paths of the electrolyte solution across the membrane and other multi-sectioned designs of degasser modules.

[0131] Although not shown in FIG. 16, the electrolyte solution replenishing system 220 may include a number of other components. For example, the electrolyte solution replenishing system 220 preferably also includes one or more additional tanks for storage of chemicals for a substrate cleaning system, such as the SRD station. Double-contained piping for hazardous material connections may also be employed to provide safe transport of the chemicals throughout the system. Optionally, the electrolyte solution replenishing system 220 includes connections to additional or external electrolyte solution processing system to provide additional electrolyte solution supplies to the electroplating system.

[0132]FIG. 17 is a cross sectional view of one embodiment of rapid thermal anneal (RTA) chamber. The RTA chamber 211 is preferably connected to the loading station 210, and substrates are transferred into and out of the RTA chamber 211 by the loading station transfer robot 228. The electroplating system, as shown in FIGS. 2 and 3, preferably comprises two RTA chambers 211 disposed on opposing sides of the loading station 210, corresponding to the symmetric design of the loading station 210. RTA chambers are generally well known in the art, and RTA chambers are typically utilized in substrate processing systems to enhance the properties of the deposited materials. A variety of RTA chamber designs, including hot plate designs and heat lamp designs, may be used to enhance the electroplating results. One RTA chamber is the WxZ chamber available from Applied Materials, Inc., located in Santa Clara, Calif. Although the invention is described using a hot plate RTA chamber, other types of RTA chambers may be used as well.

[0133] The RTA chamber 211 generally comprises an enclosure 902, a heater plate 904, a heater 907 and a plurality of substrate support pins 906. The enclosure 902 includes a base 908, a sidewall 910 and a top 912. Preferably, a cold plate 913 is disposed below the top 912 of the enclosure. Alternatively, the cold plate is integrally formed as part of the top 912 of the enclosure. Preferably, a reflector insulator dish 914 is disposed inside the enclosure 902 on the base 908. The reflector insulator dish 914 is typically made from a material such as quartz, alumina, or other material that can withstand high temperatures (i.e., greater than about 500° C.). The reflector insulator dish acts as a thermal insulator between the heater 907 and the enclosure 902. The dish 914 may also be coated with a reflective material, such as gold, to direct heat back to the heater plate 906.

[0134] The heater plate 904 preferably has a large mass compared to the substrate being processed in the system. The heater plate is preferably fabricated from a material such as silicon carbide, quartz, or other materials that do not react with any ambient gases in the RTA chamber 211 or with the. substrate material. The heater 907 typically comprises a resistive heating element or a conductive/radiant heat source and is disposed between the heated plate 906 and the reflector insulator dish 914. The heater 907 is connected to a power source 916 which supplies the energy needed to heat the heater 907. Preferably, a thermocouple 920 is disposed in a conduit 922, disposed through the base 908 and dish 914, and extends into the heater plate 904. The thermocouple 920 is connected to the controller 222 and supplies temperature measurements to the controller. The controller 222 then increases or decreases the heat supplied by the heater 907 according to the temperature measurements and the desired anneal temperature.

[0135] The enclosure 902 preferably includes a cooling member 918 disposed outside of the enclosure 902 in thermal contact with the sidewall 910 to cool the enclosure 902. Alternatively, one or more cooling channels (not shown) are formed within the sidewall 910 to control the temperature of the enclosure 902. The cold plate 913 disposed on the inside surface of the top 912 cools a substrate that is positioned in close proximity to the cold plate 913.

[0136] The RTA chamber 211 includes a slit valve 922 disposed on the sidewall 910 of the enclosure 902 for facilitating transfers of substrates into and out of the RTA chamber. The slit valve 922 selectively seals an opening 924 on the sidewall 910 of the enclosure that communicates with the loading station 210. The loading station transfer robot 228 (see FIG. 2) transfers substrates into and out of the RTA chamber through the opening 924.

[0137] The substrate support pins 906 preferably comprise distally tapered members constructed from quartz, aluminum oxide, silicon carbide, or other high temperature resistant materials. Each substrate support pin 906 is disposed within a tubular conduit 926, preferably made of a heat and oxidation resistant material, that extends through the heater plate 904. The substrate support pins 906 are connected to a lift plate 928 for moving the substrate support pins 906 in a uniform manner. The lift plate 928 is attached to an actuator 930 (such as a stepper motor) through a lift shaft 932. The actuator 930 moves the lift plate 928 to facilitate positioning of a substrate at various vertical positions within the RTA chamber. The lift shaft 932 extends through the base 908 of the enclosure 902 and is sealed by a sealing flange 934 disposed around the shaft.

[0138] To transfer a substrate into the RTA chamber 211, the slit valve 922 is opened, and the loading station transfer robot 228 extends its robot blade having a substrate positioned thereon through the opening 924 into the RTA chamber. The robot blade of the loading station transfer robot 228 positions the substrate in the RTA chamber above the heater plate 904, and the substrate support pins 906 are extended upwards to lift the substrate above the robot blade. The robot blade then retracts out of the RTA chamber, and the slit valve 922 closes the opening. The substrate support pins 906 are then retracted to lower the substrate to a desired distance from the heater plate 904. Optionally, the substrate support pins 906 may retract fully to place the substrate in direct contact with the heater plate.

[0139] Preferably, a gas inlet 936 is disposed through the sidewall 910 of the enclosure 902 to allow selected gas flow into the RTA chamber 211 during the anneal treatment process. The gas inlet 936 is connected to a gas source 938 through a valve 940 for controlling the flow of the gas into the RTA chamber 211. A gas outlet 942 is preferably disposed at a lower portion of the sidewall 910 of the enclosure 902 to exhaust the gases in the RTA chamber. The gas outlet is preferably connected to a relief/check valve 944 to prevent backstreaming of atmosphere from outside of the chamber. Optionally, the gas outlet 942 is connected to a vacuum pump (not shown) to exhaust the RTA chamber to a desired vacuum level during an anneal treatment.

[0140] A substrate is annealed in the RTA chamber 211 after the substrate has been electroplated in the electroplating cell and cleaned in the SRD station. Preferably, the RTA chamber 211 is maintained at about atmospheric pressure, and the oxygen content inside the RTA chamber 211 is controlled to less than about 100 ppm during the anneal treatment process. Preferably, the ambient environment inside the RTA chamber 211 comprises nitrogen (N₂) or a combination of nitrogen (N₂) and less than about 4% hydrogen (H₂). The ambient gas flow into the RTA chamber 211 is maintained at greater than 20 liters/min to control the oxygen content to less than 100 ppm. The electroplated substrate is preferably annealed at a temperature between about 200° C. and about 450° C. for between about 30 seconds and 30 minutes (and more preferably, between about 250° C and about 400° C. for between about 1 minute and 5 minutes). RTA processing typically requires a temperature increase of at least 50° C. per second. To provide the required rate of temperature increase for the substrate during the anneal treatment, the heater plate is preferably maintained at between about 350° C., and 450° C. The substrate is preferably positioned at between about 0 mm and about 20 mm from the heater plate (i.e., contacting the heater plate) for the duration of the anneal treatment process. Preferably, a controller 222 controls the operation of the RTA chamber 211, including maintaining the desired ambient environment in the RTA chamber and the temperature of the heater plate.

[0141] After the anneal treatment process is completed, the substrate support pins 906 lift the substrate to a position for transfer out of the RTA chamber 211. The slit valve 922 is opened, and the robot blade of the loading station transfer robot 228 is extended into the RTA chamber and positioned below the substrate. The substrate support pins 906 retract to lower the substrate onto the robot blade, and the robot blade then retracts out of the RTA chamber. The loading station transfer robot 228 then transfers the processed substrate into the cassette 232 for removal out of the electroplating processing system. (see FIGS. 2 and 3).

[0142] Referring back to FIG. 2, the system platform 200 includes a controller 222 that controls the functions of each component of the platform. Preferably, the controller 222 is mounted above the mainframe 214, and the controller comprises a programmable microprocessor. The programmable microprocessor is typically programmed using software designed specifically for controlling all components of the system platform 200. The controller 222 also provides electrical power to the components of the system and includes a control panel 223 that allows an operator to monitor and operate the system platform 200. The control panel 223, as shown in FIG. 2, is a stand-alone module that is connected to the controller 222 through a cable and provides easy access to an operator. Generally, the controller 222 coordinates the operations of the loading station 210, the RTA chamber 211, the SRD station 212, the mainframe 214 and the processing stations 218. Additionally, the controller 222 coordinates with the controller of the electrolyte solution replenishing system 220 to provide the electrolyte solution for the electroplating process.

[0143] The following is a description of a typical substrate electroplating process sequence through the system platform 200 as shown in FIG. 2. A substrate cassette containing a plurality of substrates is loaded into the substrate cassette receiving areas 224 in the loading station 210 of the system platform 200. A loading station transfer robot 228 picks up a substrate from a substrate slot in the substrate cassette and places the substrate in the substrate orientor 230. The substrate orientor 230 determines and orients the substrate to a desired orientation for processing through the system. The loading station transfer robot 228 then transfers the oriented substrate from the substrate orientor 230 and positions the substrate in one of the substrate slots in the substrate pass-through cassette 238 in the SRD station 212. The mainframe transfer robot 242 picks up the substrate from the substrate pass-through cassette 238 and positions the substrate for transfer by the flipper robot 248. The flipper robot 248 rotates its robot blade below the substrate and picks up substrate from mainframe transfer robot blade. The vacuum suction gripper on the flipper robot blade secures the substrate on the flipper robot blade, and the flipper robot flips the substrate from a face up position to a face down position. The flipper robot 248 rotates and positions the substrate face down in the substrate holder assembly 450. The substrate is positioned below the substrate holder 464 but above the electric contact element 466. The flipper robot 248 then releases the substrate to position the substrate into the electric contact element 466. The substrate holder 464 moves toward the substrate and the vacuum chuck secures the substrate on the substrate holder 464. The bladder assembly 470 on the substrate holder assembly 450 exerts pressure against the substrate backside to ensure electrical contact between the substrate plating surface and the electric contact element 466.

[0144] The head assembly 452 is lowered to a processing position above the process cell 420. At this position the substrate is below the upper plane of the weir 478 and contacts the electrolyte solution contained in the process cell 420. The power supply is activated to supply electrical power (i.e., voltage and current) to the cathode and the anode to enable the electroplating process. The electrolyte solution is typically continually pumped into the process cell during the electroplating process. The electrical power supplied to the cathode and the anode and the flow of the electrolyte solution are controlled by the controller 222 to achieve the desired electroplating results. Preferably, the head assembly is rotated as the head assembly is lowered and also during the electroplating process.

[0145] After the electroplating process is completed, the head assembly 410 raises the substrate holder assembly and removes the substrate from the electrolyte solution. Preferably, the head assembly is rotated for a period of time to enhance removal of residual electrolyte solution from the substrate holder assembly. The vacuum chuck and the bladder assembly of the substrate holder then release the substrate from the substrate holder. The substrate holder is raised to allow the flipper robot blade to pick up the processed substrate from the cathode contact ring. The flipper robot rotates the flipper robot blade above the backside of the processed substrate in the cathode contact ring and picks up the substrate using the vacuum suction gripper on the flipper robot blade. The flipper robot rotates the flipper robot blade with the substrate out of the substrate holder assembly, flips the substrate from a face-down position to a face-up position, and positions the substrate on the mainframe transfer robot blade. The mainframe transfer robot then transfers and positions the processed substrate above the SRD module 236. The SRD substrate support lifts the substrate, and the mainframe transfer robot blade retracts away from the SRD module 236. The substrate is cleaned in the SRD module using deionized water or a combination of de-ionized water and a cleaning fluid as described in detail above. The substrate is then positioned for transfer out of the SRD module. The loading station transfer robot 228 picks up the substrate from the SRD module 236 and transfers the processed substrate into the RTA chamber 211 for an anneal treatment process to enhance the properties of the deposited materials. The annealed substrate is then transferred out of the RTA chamber 211 by the loading station robot 228 and placed back into the substrate cassette for removal from the electroplating system. The above-described sequence can be carried out for a plurality of substrates substantially simultaneously in the system platform 200. Also, the electroplating system can be adapted to provide multi-stack substrate processing.

[0146] Wet Process Operations

[0147] The above system platform 200 is configured to process multiple substrates using the loading station transfer robots 228 and a mainframe transfer robot 242. The different robots, cells, or devices in the system platform can be broken down into wet or dry robots, cells, or devices. During processing, the dry robots, cells, or devices do not contact the fluids, crystals, chemicals, etc. associated with the wet processes. The dry robots, cells, or devices are maintained cleaner, and free from the impurities, associated with the wet areas. Multiple embodiments of system platforms 200 bifurcated into wet and dry areas are detailed. The fountain plater shown in FIG. 1 may be integrated into one embodiment of a wet area in a system platform.

[0148] A wet area 282 and a dry area 280 are depicted in the embodiment of the system platform 200 shown in FIG. 3. Processing of the substrate is performed in the wet robots, cells, or devices. The substrate is introduced into, or removed from, the dry robots, cells, or devices of the system platform. The substrates in the loading station are dry (contain no crystals or chemicals such as copper sulfate) to limit the passage of chemicals associated with the transfer of the substrate to different process cells. Additionally, “dry” substrates that are not coated with copper sulfate crystals do not have the surface irregularities associated with the crystals. It is more difficult for a vacuum plate of a robot device to form a seal with substrates that have the surface coarseness associated with crystalline coating since air can leak between the course surface provided by the crystalline surface. The substrate being dry and clean from impurities makes further processing on the substrate easier. The robot transfer and processing steps and equipment associated with cleaning the crystals from the substrate can be limited.

[0149] As indicated in the embodiment of FIG. 3, the dry areas 280 comprises the components of the loading station 210 (the thermal anneal chambers 211, the cassette receiving areas 224, the substrate orientor 230, and the substrate cassette 232). The wet areas 282 comprises the SRD station 211, including the SRD modules 236, the IBC system 235, and the in-stations 238, the mainframe 214, including the processing station, and the electrolyte solution replenishing system 220. The wet area contains those locations within the system platform 200 where liquids and chemical crystals that are contained in electrolyte solution may be present. Due to typical processing operations, it is desired to keep substrates within the wet areas 282 as dry and free from crystals as practical. However, a certain amount of liquids and crystals from the processes and stations within the wet areas 282 will transfer to other processes, stations, and robots within the wet area during transfer and processing operations. Therefore, wet areas 282 have to be cleaned frequently to limit a build-up from the residue from the liquids and crystals used within the wet areas.

[0150] By comparison, the SRD module 236 and the IBC system 235 performs a more thorough rinsing, using for example de-ionized water or an etchant, than possible within the processing stations 218 in general. In general, the SRD station removes unwanted deposits at certain locations such as the backside of the substrate, as well as rinsing the entire surface of the substrate with de-ionized water. In the SRD module 236, the substrate is rotated at a high angular velocity (often thousands of RPMs) with a rinse liquid being directed at the surface of the substrate such that liquids or crystals on the substrate are removed by rinsing and centrifugal force. In the IBC system 235, unwanted deposits and crystals are removed from surfaces of the substrates such as the beveled edges. In the IBC system, de-ionized water is applied to the surface of the substrate and the substrate is spun at relatively high angular velocities (for example, often thousands of RPMs). Liquids on the surface of the substrate are removed by the spinning action of the substrate within the IBC system 235.

[0151] The SRD module 236 and the IBC system 235 can therefore interact to remove any liquids on the surface of the substrates. In addition, the SRD module 236 and/or the IBC system 235 can be used to remove unwanted deposits and crystals from the surface of the substrate. As such, undesired liquids, deposits, and crystals (such a copper sulfate crystals) that remain on the surface of the substrate after processing within the processing stations 218 can be removed within the SRD station 212 of the system platform 200. As such, it is entirely possible to deliver any wafer from the wet area 282 to the dry area 280 in a condition that is dry, clean, and free of unwanted chemicals, deposits, and crystals. A wafer that is dry and clean is in the condition where it can be quickly transferred to another process cell or cluster tool to perform further desired processing, or as a finished product. In brief, a dry and clean wafer can be transferred to the dry area 280 for further processing without fear of transfer of chemicals, crystals and deposits.

[0152] The use of wet and dry areas (that contain respective wet and dry robots and respective wet and dry cells) in system platform 200 may be performed in electroplating systems, or systems that perform any other known wet process. For example, electroless processes and chemical mechanical polishing (CMP), processes may both be considered “wet” processes. Electroless systems involve volatile chemicals contained in an electroless bath. One example of a CMP process is shown and described in U.S. Pat. No. 5,234,867, ENTITLED “METHOD FOR PLANARIZING SEMICONDUCTOR WAFERS WITH A NON-CIRCULAR POLISHING PAD”, to Schultz (incorporated herein by reference). One example of an electroless system is provided in U.S. patent application Ser. No. 09/350877, entitled “IN-SITU ELECTROLESS COPPER SEED LAYER ENHANCEMENT IN AN ELECTROPLATING SYSTEM” to Cheung et al. (incorporated herein by reference). When the substrates are immersed into the electroless bath, metals contained in the electroless bath are deposited on a surface of the substrate. Systems that use electroless systems or CMP systems could also be segmented into wet and dry areas. For example, in the above disclosure, CMP cells or electroless cells could be provided in place of the electroplating process cells 240 shown in FIGS. 2 and 3.

[0153]FIG. 27 shows one embodiment of a method 2700 to be performed by the controller 222 to control the operation of the mainframe transfer robot 242 and the loading station transfer robot 242. The method 2700 should be read in conjunction with FIGS. 2 and 3. In this disclosure, the mainframe transfer robot 242 is considered a “wet” robot since it receives substrates that have been processed. By comparison, the loading station transfer robot 228 is considered a “dry” robot since the substrates that it handles are dry prior top processing, or have been dried following processing. The processed substrates are sent through the SRD module before they encounter the loading station transfer robot 228. Therefore, the substrates that the loading station transfer robot encounters are “dry”.

[0154] The method 2700 starts with block 2702 in which the dry robot 228 drops a substrate into the in-station 238. The dry robot originally receives the substrate from one of the cassette receiving areas 224. The method 2700 continues to block 2704 in which the wet robot 242 picks up the substrate from the in-station. The method continues to block 2706 in which the wet robot 242 transfers the substrate to the process cell 240 to process the substrate. During block 2706, the processing of the substrate may involve the wet robot 242 alternatively transferring the substrate between the process cell 240, the SRD module 236, and/or the IBC station 235. The process cell deposits another layer of metal film on the seed layer on the substrate and the IBC station 235. Unwanted deposits are removed from the surface of the substrate in the SRD module 236 or the IBC station.

[0155] After the final layer of metal film is deposited in the process cell 240, the method 2700 continues to block 2708 in which the wet robot 242 transfers the substrate to the IBC system 235. While the substrates are in the IBC system 235, the unwanted deposits are removed from the surface of the substrate. The surface of the substrates are then rinsed with de-ionized water. The method 2700 continues to block 2712 in which the (wet) substrates are transferred by the wet robot 242 to the appropriate SRD module 236. While the substrates are in the SRD module, the substrates are spun with an etchant applied to unwanted deposits to etch the unwanted deposits. De-ionized water is then applied to the substrate to rinse the etchant and the etched deposited material from the surface of the substrate. The substrate is then spun at a relatively high angular velocity (typically in the thousands of rotations per minute). The spinning of the substrate is sufficient to remove any residual liquid (etchant, electrolyte solution, or de-ionized water) from the surface of the substrate. Following the spinning of the substrate in the SRD module 236, the substrate is dry and can be handled as being dry. The dry substrate will not contact further robots and cells that encounter the substrate.

[0156] The method 2700 continues to block 2716 in which the clean robot 228 picks up the dry substrate from the SRD module and handles the substrate as desired. Typically, the dry substrates are transferred to the substrate cassette receiving areas 224. One or more substrates can be picked up from the substrate cassette receiving areas 224 using known techniques.

[0157] The method 2700 thereby provides a technique by which substrates are transferred within wet areas 282 or dry areas 280 separated by a separation line 284. The surface of the substrates contained within the wet areas 282 may be (and typically are) wet from electrolyte solution, etchant, and/or de-ionized water, etc. The wet robot 242 is configured to handle wet substrates, and the wet robot should be cleaned frequently. The surface of the substrates within the dry area 280 is typically maintained “dry” and free of crystals, chemicals, and deposits. The dry robot 228 is configured to handle dry substrates, and the dry robot does not have to cleaned or dried nearly as frequently as the wet robot 242 of the impurities contained in the wet robot. Segmenting the electroplating system platform 200 into “wet” and “dry” areas limits those areas (the wet areas) that have to be cleaned more frequently to limit passage of fluids, chemicals, deposits, and/or crystals to the robots, cells, and processing equipment.

[0158] While the foregoing is directed to the preferred embodiment of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof. 

What is claimed is:
 1. A method of processing a semiconductor substrate in a processing system segmented into a wet area and a dry area, the method comprising: introducing the semiconductor substrate into the dry area of the processing system; moving the semiconductor substrate into the wet area of the processing system; processing the semiconductor substrate in an electrochemical processing cell; and removing unwanted deposits disposed on the semiconductor substrate during processing.
 2. The method of claim 1, further comprising transferring the semiconductor substrate to the dry area of the processing system after removing the unwanted deposits disposed on the semiconductor substrate.
 3. The method of claim 1, wherein removing the unwanted deposits comprises rinsing and drying the semiconductor substrate.
 4. The method of claim 1, wherein removing the unwanted deposits comprises spinning and rinsing the semiconductor substrate.
 5. The method of claim 1, wherein removing the unwanted deposits comprises spinning, rinsing and drying the semiconductor substrate.
 6. The method of claim 1, wherein removing the unwanted deposits comprises rinsing and drying the semiconductor substrate in a cleaning module disposed between the wet area and the dry area.
 7. The method of claim 1, wherein removing the unwanted deposits comprises: rinsing the semiconductor substrate with de-ionized water.
 8. The method of claim 1, wherein removing the unwanted deposits comprises: rinsing the semiconductor substrate with at least one of an etchant, de-ionized water and alcohol.
 9. The method of claim 1, wherein removing the unwanted deposits comprises: spinning the semiconductor substrate at a high angular velocity; and rinsing the semiconductor substrate with at least one of an etchant and de-ionized water.
 10. The method of claim 1, wherein removing the unwanted deposits comprises: spinning the semiconductor substrate at a high angular velocity; delivering one of a rinsing fluid and de-ionized water onto a top surface of the semiconductor substrate; and delivering one of an etchant and acid onto a bottom side of the semiconductor substrate.
 11. The method of claim 10, wherein the one of the rinsing fluid and de-ionized water is delivered at a greater rate than the one of the etchant and the acid.
 12. The method of claim 1, wherein removing the unwanted deposits comprises: spinning the semiconductor substrate at a high angular velocity; applying an etchant to the unwanted deposits disposed on the semiconductor substrate; applying de-ionized water to the semiconductor substrate to remove the etchant and the unwanted deposits from the semiconductor substrate; and continuing to spin the semiconductor substrate to dry the semiconductor substrate.
 13. The method of claim 1, wherein removing the unwanted deposits comprises removing the unwanted deposits from one or more beveled edges of the semiconductor substrate.
 14. The method of claim 1, wherein removing the unwanted deposits comprises: spinning the semiconductor substrate at a high angular velocity; and rinsing one or more beveled edges of the semiconductor substrate with at least one of an etchant and de-ionized water.
 15. The method of claim 1, wherein removing the unwanted deposits comprises: spinning the semiconductor substrate at a high angular velocity; and delivering at least one of an etchant and de-ionized water to a peripheral edge of the semiconductor substrate.
 16. The method of claim 1, wherein removing the unwanted deposits comprises: spinning the semiconductor substrate at a high angular velocity; delivering an etchant to a peripheral edge of the semiconductor substrate; and delivering de-ionized water to the peripheral edge of the semiconductor substrate after delivering the etchant to the peripheral edge.
 17. The method of claim 1, wherein removing the unwanted deposits comprises removing the unwanted deposits disposed along an edge of the semiconductor substrate to create an edge exclusion zone.
 18. The method of claim 1, wherein processing the semiconductor substrate comprises exposing the semiconductor substrate to an electrolyte solution contained in the electrochemical processing cell.
 19. The method of claim 1, further comprising annealing the semiconductor substrate in a thermal anneal chamber after removing the unwanted deposits.
 20. An electroplating system, comprising: a wet area comprising one or more electrochemical processing cells for processing one or more semiconductor substrates in an electrolyte solution; a dry area for transferring the semiconductor substrates to the wet area prior to processing the semiconductor substrates and for receiving the semiconductor substrates from the wet area after processing the semiconductor substrates; and a cleaning module for removing unwanted deposits from the semiconductor substrates after processing the semiconductor substrates in the wet area but prior to transferring the semiconductor substrates to the dry area.
 21. The system of claim 20, wherein the cleaning module is disposed between the dry area and the wet area.
 22. The system of claim 20, wherein the cleaning module comprises: a housing; a rotatable pedestal disposed in the housing; and a first plurality of nozzles disposed around the housing for delivering rinsing fluid to the surfaces of the semiconductor substrates.
 23. The system of claim 22, wherein the cleaning module further comprises: a second plurality of nozzles disposed around the housing for delivering fluid to one or more beveled edges of the semiconductor substrates.
 24. The system of claim 20, wherein the dry area comprises a thermal chamber configured to anneal the semiconductor substrates after the unwanted deposits are removed from the semiconductor substrates.
 25. The system of claim 24, wherein the thermal chamber comprises: a heating plate positioned inside the chamber; a cooling plate positioned inside the chamber; a gas inlet disposed through the chamber to supply gases into the chamber; and a gas outlet disposed at a lower portion of the chamber to exhaust the gases out of the chamber.
 26. The system of claim 24, wherein the thermal anneal chamber further comprises a plurality of pins disposed through the heating plate configured to support the semiconductor substrates.
 27. The system of claim 24, wherein the heating plate is configured to heat a lower surface of the semiconductor substrate.
 28. The system of claim 24, wherein the cooling plate is configured to cool an upper surface of the semiconductor substrate.
 29. The system of claim 20, wherein the dry area further comprises a dry robot for transferring the semiconductor substrates within the dry area and for transferring the semiconductor substrates between the dry area and the wet area.
 30. The system of claim 20, wherein the wet area further comprises a wet robot for transferring the semiconductor substrates within the wet area and for transferring the semiconductor substrates between the wet area and the dry area.
 31. The system of claim 20, wherein the dry area further comprises a dry robot for transferring the semiconductor substrates within the dry area and for transferring the semiconductor substrates between the dry area and the wet area; and wherein the wet area further comprises a wet robot for transferring the semiconductor substrates within the wet area and for transferring the semiconductor substrates between the wet area and the dry area.
 32. An electroplating system, comprising: a wet area comprising one or more electrochemical processing cells for processing one or more substrates in an electrolyte solution; a dry area for transferring the substrates to the wet area prior to processing the substrates and for receiving the substrates from the wet area after processing the substrates; a cleaning module disposed between the dry area and the wet area, wherein the cleaning module is configured to remove unwanted deposits from the substrates after processing the substrates in the wet area but prior to transferring the substrates to the dry area, and wherein the cleaning module comprises a first plurality of nozzles configured to remove the unwanted deposits from the surfaces of the substrates and a second plurality of nozzles configured to remove the unwanted deposits from the beveled edges of the substrates; wherein the dry area comprises: a thermal chamber configured to anneal the substrates after the unwanted deposits are removed from the substrates; and a dry robot for transferring the substrates within the dry area and for transferring the substrates between the dry area and the wet area; and wherein the wet area further comprises a wet robot for transferring the substrates within the wet area and for transferring the substrates between the wet area and the dry area.
 33. An electroplating system, comprising: a wet area comprising one or more electrochemical processing cells for processing one or more substrates in an electrolyte solution; a dry area for transferring the substrates to the wet area prior to processing the substrates and for receiving the substrates from the wet area after processing the substrates; and a cleaning module disposed between the dry area and the wet area, wherein the cleaning module is configured to remove unwanted deposits from the substrates after processing the substrates in the wet area but prior to transferring the substrates to the dry area, and wherein the cleaning module comprises: a housing; a rotatable pedestal disposed in the housing; and a plurality of nozzles disposed around the housing for delivering rinsing fluid to the substrates.
 34. An electroplating system, comprising: a wet area comprising one or more electrochemical processing cells for processing one or more substrates in an electrolyte solution; and a dry area for transferring the substrates to the wet area prior to processing the substrates and for receiving the substrates from the wet area after processing the substrates, wherein the dry area comprises a thermal anneal chamber for annealing the substrates after processing the substrates in the wet area.
 35. The system,of claim 34, further comprising a cleaning module disposed in a substrate pathway between the one or more electrochemical processing cells and the thermal anneal chamber.
 36. The system of claim 35, further comprising one or more robots configured to transfer the substrates along the substrate pathway.
 37. The system of claim 35, wherein the cleaning module comprises: a housing; a rotatable pedestal disposed in the housing; and a first plurality of nozzles disposed around the housing for delivering rinsing fluid to the substrates.
 38. The system of claim 37, wherein the cleaning module further comprises a second plurality of nozzles disposed around the housing for delivering fluid to one or more beveled edges of the substrates.
 39. The system of claim 34, further comprising one or more robots for transferring the substrates within the wet area, within the dry area and between the wet area and dry area.
 40. The system of claim 34, wherein the wet area comprises a wet robot for transferring the substrates within the wet area and for transferring the substrates between the wet area and the dry area.
 41. The system of claim 34, wherein the dry area further comprises a dry robot for transferring the substrates within the dry area and for transferring the substrates between the dry area and the wet area.
 42. The system of claim 34, wherein the wet area comprises a wet robot for transferring the substrates within the wet area and for transferring the substrates between the wet area and the dry area; and wherein the dry area further comprises a dry robot for transferring the substrates within the dry area and for transferring the substrates between the dry area and the wet area.
 43. The system of claim 34, wherein the thermal chamber comprises: a heating plate positioned inside the chamber; a cooling plate positioned inside the chamber; a gas inlet disposed through the chamber to supply gases into the chamber; and a gas outlet disposed at a lower portion of the chamber to exhaust the gases out of the chamber.
 44. An electroplating system, comprising: a wet area comprising one or more electrochemical processing cells for processing one or more substrates in an electrolyte solution; a dry area for transferring the substrates to the wet area prior to processing the substrates and for receiving the substrates from the wet area after processing the substrates, wherein the dry area comprises a thermal anneal chamber for annealing the substrates after processing the substrates in the wet area; a cleaning module disposed in a substrate pathway between the one or more electrochemical processing cells and the thermal anneal chamber; and one or more robots for transferring the substrates within the wet area, within the dry area and between the wet area and dry area. 